Integration of a micro lens on a micro XY-stage

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3892, Issue , 1999, Pages 109-117

  Kim, Che Heung ^a   Kim, Yong Kweon ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BONDING; DEGREES OF FREEDOM (MECHANICS); OPTICAL INSTRUMENT LENSES; PHOTORESISTS; REACTIVE ION ETCHING; ULTRAVIOLET RADIATION;

ANODIC BONDING; MICRO-FRESNEL LENS; MICRO-SPHERICAL LENSES; PHOTOTHERMAL TECHNIQUES;

OPTICAL SYSTEMS;

EID: 0033332410     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)