Design and modeling of thermally actuated MEMS nanopositioners

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn 7 MEMS, Issue , 2005, Pages 561-568

  Bergna, Sébastien ^a   Gorman, Jason J ^a   Dagalakis, Nicholas G ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

MEMS; Nanopositioning; Thermal actuator

Indexed keywords

DISPLACEMENT; FLEXURE MECHANISM; MEMS NANOPOSITIONERS; NANOPOSITIONING MECHANISMS;

ACTUATORS; CALIBRATION; IMAGE PROCESSING; NANOTECHNOLOGY; OPTICAL SENSORS; SCANNING ELECTRON MICROSCOPY;

MICROELECTROMECHANICAL DEVICES;

EID: 33645977492     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-82158     Document Type: Conference Paper

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