Electrostatically actuated cantilever with SOI-MEMS parallel kinematic XY stage

Journal of Microelectromechanical Systems

Volumn 18, Issue 3, 2009, Pages 641-651

  Dong, Jingyan ^a   Ferreira, Placid M ^b  

^a North Carolina State University   (United States)

^b UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Active cantilever; Actuators; Bars; Comb drive; Couplings; Fasteners; Joints; Kinematics; Micropositioning stage; Parallel kinematic mechanism (PKM); Springs; Tilt plate actuator

Indexed keywords

ACTIVE CANTILEVER; BARS; COMB DRIVE; JOINTS; MICROPOSITIONING STAGE; PARALLEL KINEMATIC MECHANISM (PKM); SPRINGS; TILT-PLATE ACTUATOR;

ACTUATORS; COMPOSITE MICROMECHANICS; COUPLINGS; DRIVES; ELECTROSTATIC ACTUATORS; FABRICATION; KINEMATICS; LOCKS (FASTENERS); MACHINE DESIGN; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MONOLITHIC INTEGRATED CIRCUITS; NANOCANTILEVERS; NATURAL FREQUENCIES; PLATES (STRUCTURAL COMPONENTS); REACTIVE ION ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

ATOMIC FORCE MICROSCOPY;

EID: 67649130142     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2020371     Document Type: Article

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