Dependence of the Schottky barrier on the work function at metal/SiON/SiC(0001) interfaces identified by first-principles calculations

Surface Science

Volumn 606, Issue 19-20, 2012, Pages 1501-1506

  Ando, Yasunobu ^a   Gohda, Yoshihiro ^a   Tsuneyuki, Shinji ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Density functional theory; Schottky barrier; Schottky limit; SiON SiC

Indexed keywords

FERMI LEVEL PINNING; FIRST-PRINCIPLES CALCULATION; SCHOTTKY; SCHOTTKY BARRIER HEIGHTS; SCHOTTKY BARRIERS; SION/SIC;

CALCULATIONS; DENSITY FUNCTIONAL THEORY; SCHOTTKY BARRIER DIODES; SILICON CARBIDE; WORK FUNCTION;

SEMICONDUCTOR METAL BOUNDARIES;

EID: 84864463316     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2012.05.023     Document Type: Article

References (43)

1. S. Rashkeev, W. Lambrecht, and B. Segall Phys. Rev. B 55 1997 16472
2. M. Kohyama, and J. Hoekstra Phys. Rev. B 61 2000 2672
3. S. Tanaka, and M. Kohyama Phys. Rev. B 64 2001 235308
4. G. Profeta, A. Blasetti, S. Picozzi, A. Continenza, and A. Freeman Phys. Rev. B 64 2001 235312
5. M. Aboelfotoh, C. Fröjdh, and C. Petersson Phys. Rev. B 67 2003 075312
6. Z. Wang, S. Tsukimoto, M. Saito, and Y. Ikuhara Phys. Rev. B 79 2009 045318
7. W. Schottky Z. Phys. 118 1942 539
8. T. Sakurai, and T. Sugino J. Appl. Phys. 52 1981 2889
9. S. Louie, and M. Cohen Phys. Rev. B 13 1976 2461
10. S. Louie, J. Chelikowsky, and M. Cohen Phys. Rev. B 15 1977 2154
11. J. Tersoff Phys. Rev. Lett. 52 1984 465
12. T. Reusch, M. Wenderoth, L. Winking, N. Quaas, and R. Ulbrich Phys. Rev. Lett. 93 2004 206801
13. Y. Terada, S. Yoshida, O. Takeuchi, and H. Shigekawa Nat. Photonics 4 2010 869
14. J. Bardeen Phys. Rev. 71 1947 717
15. T. Teraji, and S. Hara Phys. Rev. B 70 2004 035312
16. Y. Gohda, S. Watanabe, and A. Groß Phys. Rev. Lett. 101 2008 166801
17. Y. Takei, and T. Nakayama Jpn. J. Appl. Phys. 42 2009 081001
18. H. Kageshima, and M. Kasu Jpn. J. Appl. Phys. 48 2009 111602
19. T. Shirasawa, K. Hayashi, S. Mizuno, S. Tanaka, K. Nakatsuji, F. Komori, and H. Tochihara Phys. Rev. Lett. 98 2007 136105
20. F. Devynck, Ž. Šljivančanin, and A. Pasquarello Appl. Phys. Lett. 91 2007 061930
21. P. Krüger, B. Baumeier, and J. Pollmann Phys. Rev. B 77 2008 085329
22. T. Shirasawa, K. Hayashi, H. Yoshida, S. Mizuno, S. Tanaka, T. Muro, Y. Tamenori, Y. Harada, T. Tokushima, Y. Horikawa, E. Kobayashi, T. Kinoshita, S. Shin, T. Takahashi, Y. Ando, K. Akagi, S. Tsuneyuki, and H. Tochihara Phys. Rev. B 79 2009 241301(R)
23. H. Tochihara, and T. Shirasawa Prog. Surf. Sci. 86 2011 295
24. L. Levien, and C. Prewitt Am. Mineral. 66 1981 324
25. S. Tsuneyuki, M. Tsukada, H. Aoki, and Y. Matsui Phys. Rev. Lett. 61 1988 869
26. Y. Gohda, and S. Tsuneyuki Appl. Phys. Lett. 100 2012 053111
27. P. Hohenberg, and W. Kohn Phys. Rev. 136 1964 B864
28. W. Kohn, and L. Sham Phys. Rev. 140 1965 A1133
29. M. Otani, and O. Sugino Phys. Rev. B 73 2006 115407
30. J. Yamauchi, M. Tsukada, S. Watanabe, and O. Sugino Phys. Rev. B 54 1996 5586
31. Y. Yoshimoto, and S. Tsuneyuki Surf. Sci. 514 2002 200
32. H. Kageshima, and K. Shiraishi Phys. Rev. B 56 1997 14985
33. O. Sugino, and A. Oshiyama Phys. Rev. Lett. 68 1992 1858
34. J. Perdew, K. Burke, and M. Ernzerhof Phys. Rev. Lett. 77 1996 3865
35. D. Vanderbilt Phys. Rev. B 41 1990 7892
36. Y. Yamashita, S. Yamamoto, K. Mukai, J. Yoshinobu, Y. Harada, T. Tokushima, T. Takeuchi, Y. Takata, S. Shin, K. Akagi, and S. Tsuneyuki Phys. Rev. B 73 2006 045336
37. F. Devynck, and A. Pasquarello Surf. Sci. 602 2008 2989
38. M. Methfessel, and A. Paxton Phys. Rev. B 40 1989 3616
39. H. Aizawa, and S. Tsuneyuki Surf. Sci. 399 1998 L364
40. T. Tamura, S. Ishibashi, K. Terakura, and H. Weng Phys. Rev. B 80 2009 195302
41. M. Kiguchi, R. Arita, G. Yoshikawa, Y. Tanida, M. Katayama, K. Saiki, A. Koma, and H. Aoki Phys. Rev. Lett. 90 2003 196803
42. Y. Gohda, and S. Watanabe Phys. Rev. Lett. 87 2001 177601
43. Y. Gohda, and S. Tsuneyuki Phys. Rev. Lett. 106 2011 047201