First-principles investigation of an epitaxial silicon oxynitride layer on a 6H-SiC (0001) surface

Physical Review B - Condensed Matter and Materials Physics

Volumn 77, Issue 8, 2008, Pages

  Krüger, Peter ^a   Baumeier, Björn ^a   Pollmann, Johannes ^a  

^a UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 40949160924     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.77.085329     Document Type: Article

References (18)

1. W. J. Choyke, H. Matsunami, and G. Pensl, Silicon Carbide: Recent Major Advances (Springer, Germany, 2004).
2. V. M. Bermudez, Phys. Status Solidi B PSSBBD 0370-1972 10.1002/1521-3951(199707)202:1<421::AID-PSSB421>3.3.CO;2-4 202, 421 (1997).
3. M. Schürmann, S. Dreiner, U. Berges, and C. Westphal, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.74.035309 74, 035309 (2006), and references therein.
4. J. Berhardt, J. Schardt, U. Starke, and K. Heinz, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.123489 74, 1084 (1999).
5. U. Starke, J. Schardt, J. Bernhardt, and K. Heinz, J. Vac. Sci. Technol. A JVTAD6 0734-2101 10.1116/1.581873 17, 1688 (1999).
6. M. Hollering, F. Maier, N. Sieber, M. Stammler, J. Ristein, L. Ley, A. P. J. Stampfl, J. C. Riley, R. C. G. Leckey, F. P. Leisenberger, and F. P. Netzer, Surf. Sci. SUSCAS 0039-6028 10.1016/S0039-6028(99)00998-X 442, 531 (1999).
7. W. Lu, P. Krüger, and J. Pollmann, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.61.13737 61, 13737 (2000).
8. T. Shirasawa, K. Hayashi, S. Mizuno, S. Tanaka, K. Nakatsuji, F. Komori, and H. Tochihara, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.98. 136105 98, 136105 (2007).
9. W. Lu, P. Krüger, and J. Pollmann, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.60.2495 60, 2495 (1999).
10. D. Vogel, P. Krüger, and J. Pollmann, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.52.R14316 52, R14316 (1995);
11. D. Vogel, P. Krüger, and J. Pollmann, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.54.5495 54, 5495 (1996).
12. B. Baumeier, P. Krüger, and J. Pollmann, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.73.195205 73, 195205 (2006);
13. B. Baumeier, P. Krüger, and J. Pollmann, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.75.045323 75, 045323 (2007).
14. F. Devynck, Ž. Šljivančanin, and A. Pasquarello, Appl. Phys. Lett. APPLAB 0003-6951 10.1063/1.2769949 91, 061930 (2007).
15. J. P. Perdew, K. Burke, and M. Ernzerhof, Phys. Rev. Lett. PRLTAO 0031-9007 10.1103/PhysRevLett.77.3865 77, 3865 (1996).
16. J. P. Perdew, M. Ernzerhof, and K. Burke, J. Chem. Phys. JCPSA6 0021-9606 10.1063/1.472933 105, 9982 (1996).
17. T. H. DiStefano and D. E. Eastman, Solid State Commun. SSCOA4 0038-1098 10.1016/0038-1098(71)90643-0 9, 2259 (1970).
18. J. Tersoff and D. R. Hamann, Phys. Rev. B PRBMDO 0163-1829 10.1103/PhysRevB.31.805 31, 805 (1985).