Ion energy distributions, electron temperatures, and electron densities in Ar, Kr, and Xe pulsed discharges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 30, Issue 3, 2012, Pages

  Shin, Hyungjoo ^a   Zhu, Weiye ^a   Economou, Demetre J ^a   Donnelly, Vincent M ^a  

^a UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY ELECTRODES; DC BIAS; EDGE REGION; GLOBAL MODELS; INDUCTIVELY-COUPLED; ION DENSITY; ION ENERGY DISTRIBUTIONS; LONG AFTERGLOW; PLASMA EDGES; PULSED DISCHARGE; PULSED PLASMA; TIME-RESOLVED;

ARGON; ELECTROMAGNETIC INDUCTION; ELECTRON TEMPERATURE; KRYPTON; PLASMA DENSITY; PLASMA TURBULENCE; PLASMAS; XENON;

ELECTRIC DISCHARGES;

EID: 84864234718     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.4705515     Document Type: Article

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