Development of functional sub-100 nm structures with 3D two-photon polymerization technique and optical methods for characterization

Journal of Laser Applications

Volumn 24, Issue 4, 2012, Pages

  Paz, V Ferreras ^a   Emons, M ^b   Obata, K ^c   Ovsianikov, A ^c   Peterhansel S ^a   Frenner, K ^a   Reinhardt, C ^c   Chichkov, B ^c   Morgner, U ^b,c   Osten, W ^a  

^a UNIVERSITY OF STUTTGART   (Germany)

^b INSTITUT FÜR QUANTENOPTIK   (Germany)

^c LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

fourier scatterometry; laser materials processing; nanostructures; Photosensitive materials; resolution; sensitivity analysis; sol gel; subwavelength structures; two photon polymerization; ultrafast technology; white light interference

Indexed keywords

LASER MATERIALS PROCESSING; PHOTOSENSITIVE MATERIALS; SCATTEROMETRY; SUB-WAVELENGTH STRUCTURES; TWO PHOTON POLYMERIZATION; ULTRAFAST TECHNOLOGY; WHITE LIGHT INTERFERENCE;

FIBER OPTIC SENSORS; LIGHT SENSITIVE MATERIALS; NANOSTRUCTURES; OPTICAL RESOLVING POWER; PHOTONS; PHOTOSENSITIVITY; SENSITIVITY ANALYSIS; SOL-GEL PROCESS; SOL-GELS;

POLYMERIZATION;

EID: 84864120404     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.4712151     Document Type: Article

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