Performance analysis of coherent optical scatterometry

Applied Physics B: Lasers and Optics

Volumn 105, Issue 4, 2011, Pages 775-781

  El Gawhary, O ^a   Kumar, N ^a   Pereira, S F ^a   Coene, W M J ^b   Urbach, H P ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

FAR FIELD; FAR FIELD DIFFRACTION PATTERN; OBJECT OF INTERESTS; PERFORMANCE ANALYSIS; QUASI-MONOCHROMATIC; SCATTEROMETRY; WAVELENGTH FILTERING; WELL-ESTABLISHED TECHNIQUES;

INDUSTRIAL APPLICATIONS; LIGHT SOURCES;

COHERENT LIGHT;

EID: 84859713205     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00340-011-4794-7     Document Type: Article

References (19)

1. International Technology Roadmap for Semiconductors, Metrology, ITRS Web Resources. http://www.itrs.net/Links/2009ITRS/2009Chapters-2009Tables/2009- Metrology.pdf (2009)
2. M. Born, E. Wolf, Principles of Optics, 7th edn. (Cambridge University Press, Cambridge, 2001), pp. 217-227
3. D. Colton, R. Kress, Inverse Acoustic and Electromagnetic Scattering Theory, 2nd edn. (Springer, Heidelberg, 1998), pp. 85-93
4. American National Institute of Standards and Technology, Optical Grating Scatterometry. http://www.nist.gov/physlab/div844/grp06/scatterometry.cfm
5. E. Barouch, S.L. Knodle, Proc. SPIE 5038, 559567 (2003)
6. C. Ko, Y. Ku, Opt. Express 14, 6001 (2006)
7. M. Wurm, B. Bodermann, "Non-imaging optical metrology of structured surfaces: Prospects, challenges, and limitations", presented at the Seminar on Scatterometry and Ellipsometry on structured surfaces, Braunschweig, Germany, 18-19 March 2009
8. I. Gereige, S. Robert, S. Thiria, F. Badran, G. Granet, J.J. Rousseau, J. Opt. Soc. Am. A 25, 1661 (2008)
9. M.G. Moharam, T.K. Gaylord, J. Opt. Soc. Am. 71, 811 (1981)
10. M.G. Moharam, E.B. Grann, D.A. Pommet, J. Opt. Soc. Am. A 12, 1068 (1995)
11. L. Li, J. Opt. Soc. Am. A 13, 1870 (1996)
12. W.H. Press, S.A. Teukolsky, W. Vetterling, B.P. Flannery, Numerical Recipes in C, The Art of Scientific Computing, 2nd edn. (Cambridge University Press, Cambridge, 1995), pp. 657-674
13. R. Silver, T. Germer, R. Attota, B.M. Barnes, B. Bunday, J. Allgair, E. Marx, J. Jun, Proc. SPIE 6518, 65180U (2007) (17 pp.)
14. A. Papoulis, Probability, Random Variables and Stochastic Processes (McGraw-Hill, New York, 1991), Chapter 9
15. J.M. Rodenburg, A.C. Hurst, A.G. Cullis, Ultramicroscopy 107, 227 (2007)
16. H.M.L. Faulkner, J.M. Rodenburg, Ultramicroscopy 103, 153 (2005)
17. J.M. Rodenburg, A.C. Hurst, A.G. Cullis, B.R. Dobson, F. Pfeiffer, O. Bunk, C. David, K. Jefimovs, I. Johnson, Phys. Rev. Lett. 98, 034801 (2007)
18. L. Rayleigh, Proc. R. Soc. Lond. Ser. A 79, 399 (1907)
19. A.V. Tishchenko, Opt. Express 17, 17102 (2009)