Lamé-mode octagonal microelectromechanical system resonator utilizing slanting shape of sliding driving electrodes

Japanese Journal of Applied Physics

Volumn 51, Issue 6 PART 2, 2012, Pages

  Okamoto, Tadashi ^a   Tanigawa, Hiroshi ^a   Suzuki, Kenichiro ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMECHANICAL COUPLING COEFFICIENTS; GAP LENGTH; LASER DOPPLER; MECHANICAL DISPLACEMENTS; MEMS RESONATORS; OUTPUT SIGNAL; PATTERN SIZE; SUBMICRON; VIBROMETERS;

DEGRADATION; ELECTROMECHANICAL COUPLING; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; NATURAL FREQUENCIES;

RESONATORS;

EID: 84863322375     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.51.06FL06     Document Type: Article

References (30)

1. M. Hikita, N. Matsuura, K. Yokoyama, N. Shibagaki, and K. Sakiyama: IEEE Trans. Microwave Theory Tech. 50 (2002) 2629.
2. J. Wang, Z. Ren, and C. T.-C. Nguyen: IEEE Trans. Ultrason. 51 (2004) 1607.
3. F. Nabki, K. Allidina, F. Ahmad, P.-V. Cicek, and M. N. El-Gamal: IEEE J. Solid-State Circuits 44 (2009) 2154.
4. H. Tanigawa, S. Makita, and K. Suzuki: IEEJ Trans. Electr. Electron. Eng. 5 (2010) 164.
5. S. Makita, H. Tanigawa, and K. Suzuki: Dig. Int. Microprocesses and Nanotechnology Conf., 2007, p. 500.
6. C. T.-C. Nguyen: IEEE Trans. Ultrason. 54 (2007) 251.
7. M. Kiso, M. Okada, A. Tamano, H. Fujiura, H. Miyauchi, K. Niki, H. Tanigawa, and K. Suzuki: Jpn. J. Appl. Phys. 50 (2011) 06GM03.
8. M. Okada, H. Nagasaki, A. Tamano, K. Niki, H. Tanigawa, and K. Suzuki: Jpn. J. Appl. Phys. 48 (2009) 06FK03.
9. K. Wang, A.-C. Wong, and C. T.-C. Nguyen: J. Microelectromech. Syst. 9 (2000) 347.
10. K. Ikoma, M. Okazaki, and M. Esashi: IEEE Sensors, 2006, p. 1289.
11. Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen: Tech. Dig. IEDM., 2003, p. 953.
12. S.-S. Li, Y.-W. Lin, Z. Ren, Y. Xie, and C. T.-C. Nguyen: Tech. Dig. Micro Electro Mechanical Systems, 2004, p. 821.
13. T. Oka, H. Tanigawa, and K. Suzuki: Jpn. J. Appl. Phys. 49 (2010) 06GN05.
14. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamaki, H. Kattelus, M. Koskenvuori, P. Rantakari, I. Tittonen, and H. Seppa: Tech. Dig. Transducers, 2003, Vol. 2, p. 951.
15. M. Ziaei-Moayyed, D. Elata, J. Hsieh, J.-W. P. Chen, E. P. Quevy, and R. T. Howe: Tech. Dig. Micro Electro Mechanical Systems, 2009, p. 931.
16. K. R. Cioffi and W.-T. Hsu: Frequency Control Symp. Expo., 2005, p. 551.
17. K. Wang and C. T.-C. Nguyen: IEEE/ASME J. Microelectromech. Syst. 8 (1999) 534.
18. G. Piazza, P. J. Stephanou, J. M. Porter, M. B. J. Wijesundara, and A. P. Pisano: Tech. Dig., 18th IEEE Int. MEMS Conf., 2005, p. 20.
19. L. Khine, L. Palaniapan, and M. W.-K. Wong: IEEE Transducers and Eurosensors, 2007, p. 1753.
20. K. Hashimoto, K. Ito, H. Tanigawa, and K. Suzuki: Jpn. J. Appl. Phys. 50 (2011) 067201.
21. Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen: IEEE Trans. Ultrason. Ferroelectr. Freq. Control 55 (2008) 890.
22. M. Akgul, R. Schneider, Z. Ren, G. Chandler, V. Yeh, and C. T.-C. Nguyen: Proc. Joint Conf. IEEE Int. Frequency Control and European Frequency and Time Forum, 2011, p. 1.
23. Y.-W. Lin, S. S. Li, Z. Ren, and C. T.-C. Nguyen: Proc. Frequency Control Precision Time and Time Interval Symp., 2005, p. 128.
24. D. Galayko, A. Kaiser, B. Legrand, D. Collard, L. Buchaillot, and C. Combi: J. Micromech. Microeng. 13 (2003) 134.
25. T. Oka, T. Ishino, H. Tanigawa, and K. Suzuki: Jpn. J. Appl. Phys. 50 (2011) 06GH02.
26. J. R. Clark, W.-T. Hsu, M. A. Abdelmoneum, and C. T.-C. Nguyen: J. Microelectromesh. Syst. 14 (2005) 1298.
27. http://www.ansys.jp/
28. T. Ishino, H. Tanigawa, and K. Suzuki: Proc. 26th Sensor Symp., 2009, p. 260.
29. http://www.polytech.co.jp/
30. T. Ishino, S. Makita, H. Tanigawa, and K. Suzuki: Proc. 25th Sensor Symp., 2008, p. 551.