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Volumn 48, Issue 6 PART 2, 2009, Pages

Silicon beam resonator utilizing the third-order bending mode

Author keywords

[No Author keywords available]

Indexed keywords

BENDING MODES; DC BIAS; DC VOLTAGE; ELECTRICAL CHARACTERISTIC; IN-PLANE VIBRATION; LASER DOPPLER; MECHANICAL MEASUREMENTS; MECHANICAL VIBRATIONS; NETWORK ANALYZER; OUT-OF-PLANE VIBRATIONS; RESONANT FREQUENCIES; SILICON BEAMS; SOFTENING EFFECT; THIRD-ORDER; VIBROMETERS;

EID: 70249089377     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.48.06FK03     Document Type: Article
Times cited : (20)

References (11)
  • 8
    • 70249085077 scopus 로고    scopus 로고
    • http://www.marubeni-sys.com
  • 9
    • 70249143447 scopus 로고    scopus 로고
    • http://www.polytec.co.jp


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.