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Volumn 48, Issue 6 PART 2, 2009, Pages
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Silicon beam resonator utilizing the third-order bending mode
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Author keywords
[No Author keywords available]
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Indexed keywords
BENDING MODES;
DC BIAS;
DC VOLTAGE;
ELECTRICAL CHARACTERISTIC;
IN-PLANE VIBRATION;
LASER DOPPLER;
MECHANICAL MEASUREMENTS;
MECHANICAL VIBRATIONS;
NETWORK ANALYZER;
OUT-OF-PLANE VIBRATIONS;
RESONANT FREQUENCIES;
SILICON BEAMS;
SOFTENING EFFECT;
THIRD-ORDER;
VIBROMETERS;
CRYSTAL RESONATORS;
ELECTRIC FIELDS;
ELECTRIC NETWORK ANALYSIS;
ELECTRODES;
NATURAL FREQUENCIES;
OPTICAL INSTRUMENT LENSES;
VIBRATION ANALYSIS;
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EID: 70249089377
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.48.06FK03 Document Type: Article |
Times cited : (20)
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References (11)
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