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Volumn 50, Issue 6 PART 2, 2011, Pages

Microelectromechanical systems resonator utilizing torsional-to-transverse vibration conversion

Author keywords

[No Author keywords available]

Indexed keywords

BEAM LENGTH; BEAM STRUCTURES; CRITICAL ISSUES; ELECTRICAL CHARACTERISTIC; FABRICATION PROCESS; FLAT SURFACES; IMPEDANCE ANALYZER; IN-VACUUM; LASER DOPPLER; MICROELECTROMECHANICAL SYSTEMS RESONATORS; MOTIONAL RESISTANCE; NARROW GAP; NOVEL PROCESS; Q-FACTORS; TEMPERATURE COEFFICIENT; TEMPERATURE RISE; TORSION BEAMS; TORSIONAL MODES; TORSIONAL VIBRATION; TRANSVERSE BEAMS; VIBROMETERS;

EID: 79959478460     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.06GM03     Document Type: Article
Times cited : (10)

References (33)
  • 25
    • 79959400325 scopus 로고    scopus 로고
    • http://www.ansys.jp
  • 27
    • 79959390471 scopus 로고    scopus 로고
    • http://www.polytec.co.jp


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.