-
2
-
-
43349104353
-
-
Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen: IEEE Trans. Ultrason. Ferroelectr. Freq. Control 55 (2008) 890.
-
(2008)
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
, vol.55
, pp. 890
-
-
Xie, Y.1
Li, S.-S.2
Lin, Y.-W.3
Ren, Z.4
Nguyen, C.T.-C.5
-
3
-
-
33744758970
-
-
J. Verd, A. Uranga, J. Teva, J. L. Lopez, F. Torres, J. Esteve, G. Abadal, F. Perez-Murano, and N. Barniol: IEEE Electron Device Lett. 27 (2006) 495.
-
(2006)
IEEE Electron Device Lett.
, vol.27
, pp. 495
-
-
Verd, J.1
Uranga, A.2
Teva, J.3
Lopez, J.L.4
Torres, F.5
Esteve, J.6
Abadal, G.7
Perez-Murano, F.8
Barniol, N.9
-
6
-
-
70249095401
-
-
T. Ishino, S. Makita, H. Tanigawa, and K. Suzuki: Proc. 25th Sensor Symp., 2008, p. 551.
-
(2008)
Proc. 25th Sensor Symp.
, pp. 551
-
-
Ishino, T.1
Makita, S.2
Tanigawa, H.3
Suzuki, K.4
-
7
-
-
70249148627
-
-
M. Okada, H. Nagasaki, A. Tamano, K. Niki, H. Tanigawa, and K. Suzuki: Jpn. J. Appl. Phys. 48 (2009) 06FK03.
-
(2009)
Jpn. J. Appl. Phys.
, vol.48
-
-
Okada, M.1
Nagasaki, H.2
Tamano, A.3
Niki, K.4
Tanigawa, H.5
Suzuki, K.6
-
9
-
-
0038493939
-
-
Kyoto, Japan
-
M. A. Abdelmoneum, M. U. Demirci, and C. T.-C. Nguyen: Proc. 16th IEEE Int. Conf. Micro Electro Mech. Syst., Kyoto, Japan, 2003, p. 698.
-
(2003)
Proc. 16th IEEE Int. Conf. Micro Electro Mech. Syst.
, pp. 698
-
-
Abdelmoneum, M.A.1
Demirci, M.U.2
Nguyen, C.T.-C.3
-
11
-
-
33847161147
-
-
V. Kaajakari, P. Rantakari, J. K. Koskinen, T. Mattila, J. Kiihamaki, M. Koskenvuori, I. Tittonen, and A. Oja: Proc. IEEE Ultrasonics Symp., 2005, p. 1299.
-
(2005)
Proc. IEEE Ultrasonics Symp.
, pp. 1299
-
-
Kaajakari, V.1
Rantakari, P.2
Koskinen, J.K.3
Mattila, T.4
Kiihamaki, J.5
Koskenvuori, M.6
Tittonen, I.7
Oja, A.8
-
13
-
-
77957865773
-
-
E. Colinet, J. Arcamone, A. Niel, E. Lorent, S. Hentz, and E. Ollier: IEEE Int. Frequency Control Symp., 2010, p. 174.
-
(2010)
IEEE Int. Frequency Control Symp.
, pp. 174
-
-
Colinet, E.1
Arcamone, J.2
Niel, A.3
Lorent, E.4
Hentz, S.5
Ollier, E.6
-
18
-
-
33645648699
-
-
Y.-W. Lin, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen: Proc. IEEE Int. Frequency Control Symp., 2005, p. 128.
-
(2005)
Proc. IEEE Int. Frequency Control Symp.
, pp. 128
-
-
Lin, Y.-W.1
Li, S.-S.2
Xie, Y.3
Ren, Z.4
Nguyen, C.T.-C.5
-
21
-
-
79959427485
-
-
K. Wang, Y. Yu, A.-C. Wong, and C. T.-C. Nguyen: Tech. Dig. MEMS'99, 1999, p. 453.
-
(1999)
Tech. Dig. MEMS'99
, pp. 453
-
-
Wang, K.1
Yu, Y.2
Wong, A.-C.3
Nguyen, C.T.-C.4
-
22
-
-
0036124053
-
-
D. Galayko, A. Kaiser, B. Legrand, D. Collard, L. Buchaillot, and C. Combi: Tech. Dig. MEMS'02, 2002, p. 665.
-
(2002)
Tech. Dig. MEMS'02
, pp. 665
-
-
Galayko, D.1
Kaiser, A.2
Legrand, B.3
Collard, D.4
Buchaillot, L.5
Combi, C.6
-
25
-
-
79959400325
-
-
http://www.ansys.jp
-
-
-
-
26
-
-
0003672941
-
-
Wiley, New York, 5th ed
-
W. Weaver, Jr., S. P. Timoshenko, and D. H. Young: Vibration Problems in Engineering (Wiley, New York, 1990) 5th ed.
-
(1990)
Vibration Problems in Engineering
-
-
Weaver Jr., W.1
Timoshenko, S.P.2
Young, D.H.3
-
27
-
-
79959390471
-
-
http://www.polytec.co.jp
-
-
-
-
28
-
-
0042956960
-
-
Wiley, Hoboken, NJ
-
G. M. Rebeiz: RF MEMS Theory, Design, and Technology (Wiley, Hoboken, NJ, 2003) p. 76.
-
(2003)
RF MEMS Theory, Design, and Technology
, pp. 76
-
-
Rebeiz, G.M.1
-
29
-
-
0034580019
-
-
J. D. Larson III, P. D. Bradley, S. Wartenberg, and R. C. Ruby: Proc. IEEE Ultrasonics Symp., 2000, p. 863.
-
(2000)
Proc. IEEE Ultrasonics Symp.
, pp. 863
-
-
Larson III, J.D.1
Bradley, P.D.2
Wartenberg, S.3
Ruby, R.C.4
-
32
-
-
0031360360
-
-
C. Bourgeois, E. Steinsland, N. Blanc, and N. F. de Rooji: Proc. IEEE Int. Frequency Control Symp., 1997, p. 791.
-
(1997)
Proc. IEEE Int. Frequency Control Symp.
, pp. 791
-
-
Bourgeois, C.1
Steinsland, E.2
Blanc, N.3
De Rooji, N.F.4
|