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Volumn 50, Issue 6 PART 2, 2011, Pages
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Silicon beam microelectromechanical systems resonator with a sliding electrode
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Author keywords
[No Author keywords available]
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Indexed keywords
BEAM DISPLACEMENT;
BEAM RESONATORS;
DISPLACEMENT AMPLITUDES;
ELECTRICAL DOMAINS;
GAP LENGTH;
INITIAL GAP;
MICROELECTROMECHANICAL SYSTEMS RESONATORS;
NARROW GAP;
PULL-IN;
Q-FACTORS;
SILICON BEAMS;
COMPOSITE MICROMECHANICS;
FABRICATION;
MECHATRONICS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
NATURAL FREQUENCIES;
RESONATORS;
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EID: 79959389088
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.50.06GH02 Document Type: Article |
Times cited : (18)
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References (27)
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