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Volumn 50, Issue 6 PART 2, 2011, Pages

Silicon beam microelectromechanical systems resonator with a sliding electrode

Author keywords

[No Author keywords available]

Indexed keywords

BEAM DISPLACEMENT; BEAM RESONATORS; DISPLACEMENT AMPLITUDES; ELECTRICAL DOMAINS; GAP LENGTH; INITIAL GAP; MICROELECTROMECHANICAL SYSTEMS RESONATORS; NARROW GAP; PULL-IN; Q-FACTORS; SILICON BEAMS;

EID: 79959389088     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.50.06GH02     Document Type: Article
Times cited : (18)

References (27)
  • 23
    • 79959391882 scopus 로고    scopus 로고
    • http://www.ansys.jp
  • 25
    • 79959412959 scopus 로고    scopus 로고
    • http://www.polytc.co.jp


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.