Automated nanomanipulation for nanodevice construction

Nanotechnology

Volumn 23, Issue 6, 2012, Pages

  Zhang, Yan Liang ^a   Li, Jason ^a   To, Steve ^a   Zhang, Yong ^a   Ye, Xutao ^a   You, Lidan ^a   Sun, Yu ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

AUTOMATED NANOMANIPULATION; CONTACT PRINTING; DEVICE PARAMETERS; HIGHLY SENSITIVE; LABEL-FREE SENSING; NANO DEVICE; NANO-DEVICES; NANO-ROBOTIC MANIPULATION; PHOTOLITHOGRAPHY MASKS; POST PROCESSING; PRECISION CONTROL; SCANNING ELECTRON MICROSCOPE; SEAMLESS INTEGRATION; WAFER-SCALE;

AUTOMATION; MESFET DEVICES; MICROMANIPULATORS; NANOROBOTICS; NANOSENSORS; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; PRINTING; SCANNING ELECTRON MICROSCOPY; SENSITIVITY ANALYSIS;

NANOWIRES;

EID: 84862929917     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/23/6/065304     Document Type: Article

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