Effect of nanowire number, diameter, and doping density on nano-FET biosensor sensitivity

ACS Nano

Volumn 5, Issue 8, 2011, Pages 6661-6668

  Li, Jason ^a,b   Zhang, Yanliang ^a   To, Steve ^a   You, Lidan ^a,b   Sun, Yu ^a,b  

^a UNIVERSITY OF TORONTO   (Canada)

^b UNIVERSITY OF TORONTO   (Canada)

Author keywords

biosensor; nano FET; nano FET fabrication; nanomanipulation; nanowire diameter; nanowire doping density; nanowire number

Indexed keywords

BIOLOGICAL MOLECULE; DEVICE DESIGN; DEVICE SENSITIVITY; DOPING DENSITIES; EXPERIMENTAL STUDIES; FABRICATION PROCESS; HIGH SENSITIVITY; LABEL-FREE DETECTION; NANO-FET; NANO-FET FABRICATION; NANOMANIPULATIONS; NANOWIRE DEVICES; PERFORMANCE VARIATIONS; POST PROCESSING; SEMICONDUCTIVE; THEORETICAL PREDICTION;

BIOSENSORS; EQUIPMENT; MESFET DEVICES; MICROMANIPULATORS; NANOSENSORS; NUCLEIC ACIDS; SENSITIVITY ANALYSIS; VIRUSES;

NANOWIRES;

IMMUNOGLOBULIN G; NANOWIRE; SILICON;

ARTICLE; CHEMISTRY; ELECTRIC CONDUCTIVITY; GENETIC PROCEDURES; HUMAN; INSTRUMENTATION; NANOTECHNOLOGY; SEMICONDUCTOR;

BIOSENSING TECHNIQUES; ELECTRIC CONDUCTIVITY; HUMANS; IMMUNOGLOBULIN G; NANOTECHNOLOGY; NANOWIRES; SILICON; TRANSISTORS, ELECTRONIC;

EID: 80052056328     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn202182p     Document Type: Article

References (43)

1. Cui, Y.; Wei, Q.; Park, H.; Lieber, C. M. Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species Science 2001, 293, 1289-1292 (Pubitemid 32777412)
2. Zheng, G.; Patolsky, F.; Cui, Y.; Wang, W. U.; Lieber, C. M. Multiplexed Electrical Detection of Cancer Markers with Nanowire Sensor Arrays Nat. Biotechnol. 2005, 23, 1294-1301 (Pubitemid 41486858)
3. Stern, E.; Klemic, J. F.; Routenberg, D. A.; Wyrembak, P. N.; Turner-Evans, D. B.; Hamilton, A. D.; LaVan, D. A.; Fahmy, T. M.; Reed, M. A. Label-Free Immunodetection with CMOS-Compatible Semiconducting Nanowires Nature 2007, 445, 519-522 (Pubitemid 46197629)
4. Hahm, J.; Lieber, C. M. Direct Ultrasensitive Electrical Detection of DNA and DNA Sequence Variations Using Nanowire Nanosensors Nano Lett. 2004, 4, 51-54 (Pubitemid 38167862)
5. Bunimovich, Y. L.; Shin, Y. S.; Yeo, W. S.; Amori, M.; Kwong, G.; Heath, J. R. Quantitative Real-Time Measurements of DNA Hybridization with Alkylated Nonoxidized Silicon Nanowires in Electrolyte Solution J. Am. Chem. Soc. 2006, 128, 16323-16331 (Pubitemid 44936627)
6. Patolsky, F.; Zheng, G.; Hayden, O.; Lakadamyali, M.; Zhuang, X.; Lieber, C. M. Electrical Detection of Single Viruses Proc. Natl. Acad. Sci. U.S.A. 2004, 101, 14017-14022 (Pubitemid 39305021)
7. Minot, E. D.; Janssens, A. M.; Heller, I.; Herring, H. A.; Dekker, C.; Lemay, S. G. Carbon Nanotube Biosensors: The Critical Role of the Reference Electrode Appl. Phys. Lett. 2007, 91, 093507-093507-03
8. Fan, Z.; Lu, J. G. Chemical Sensing with ZnO Nanowire Field-Effect Transistor IEEE Trans. Nanotechnol. 2006, 5, 393-396 (Pubitemid 44102130)
9. 3 Nanowires and Carbon Nanotubes J. Am. Chem. Soc. 2005, 127, 12484-12485 (Pubitemid 41292155)
10. Zhang, G. J.; Zhang, G.; Chua, J. H.; Chee, R. E.; Wong, E. H.; Agarwal, A.; Buddharaju, K. D.; Singh, N.; Gao, Z.; Balasubramanian, N. DNA Sensing by Silicon Nanowire: Charge Layer Distance Dependence Nano Lett. 2008, 8, 1066-1070
11. Maehashi, K.; Katsura, T.; Kerman, K.; Takamura, Y.; Matsumoto, K.; Tamiya, E. Label-Free Protein Biosensor Based on Aptamer-Modified Carbon Nanotube Field-Effect Transistors Anal. Chem. 2007, 79, 782-787 (Pubitemid 46106151)
12. Gao, X. P. A.; Zheng, G.; Lieber, C. M. Subthreshold Regime has the Optimal Sensitivity for Nanowire FET Biosensors Nano Lett. 2010, 10, 547-552
13. Heller, I.; Mannik, J.; Lemay, S. G.; Dekker, C. Optimizing the Signal-to-Noise Ratio for Biosensing with Carbon Nanotube Transistors Nano Lett. 2009, 9, 377-382
14. Lu, M. P.; Hsiao, C. Y.; Lai, W. T.; Yang, Y. S. Probing the Sensitivity of Nanowire-Based Biosensors Using Liquid-Gating Nanotechnology 2010, 21, 425505
15. Stern, E.; Steenblock, E. R.; Reed, M. A.; Fahmy, T. M. Label-Free Electronic Detection of the Antigen-Specific T-Cell Immune Response Nano Lett. 2008, 8, 3310-3314
16. Stern, E.; Vacic, A.; Li, C.; Ishikawa, F. N.; Zhou, C.; Reed, M. A.; Fahmy, T. M. A Nanoelectronic Enzyme-Linked Immunosorbent Assay for Detection of Proteins in Physiological Solutions Small 2010, 6, 232-238
17. Squires, T. M.; Messinger, R. J.; Manalis, S. R. Making it Stick: Convection, Reaction and Diffusion in Surface-Based Biosensors Nat. Biotechnol. 2008, 26, 417-426 (Pubitemid 351501812)
18. Kim, D. R.; Zheng, X. Numerical Characterization and Optimization of the Microfluidics for Nanowire Biosensors Nano Lett. 2008, 8, 3233-3237
19. Sheehan, P. E.; Whitman, L. J. Detection Limits for Nanoscale Biosensors Nano Lett. 2005, 5, 803-807 (Pubitemid 40609764)
20. Cui, Y.; Duan, X.; Hu, J.; Lieber, C. M. Doping and Electrical Transport in Silicon Nanowires J. Phys. Chem. B 2000, 104, 5213-5216
21. Ford, A. C.; Ho, J. C.; Chueh, Y. L.; Tseng, Y. C.; Fan, Z.; Guo, J.; Bokor, J.; Javey, A. Diameter-Dependent Electron Mobility of InAs Nanowires Nano Lett. 2009, 9, 360-365
22. Black, C. T. Self-Aligned Self Assembly of Multi-nanowire Silicon Field Effect Transistors Appl. Phys. Lett. 2005, 87, 163113-163116
23. 3 Nanowire Devices Nano Lett. 2004, 4, 1919-1924
24. Elfstrom, N.; Juhasz, R.; Sychugov, I.; Engfeldt, T.; Karlstrom, A. E.; Linnros, J. Surface Charge Sensitivity of Silicon Nanowires: Size Dependence Nano Lett. 2007, 7, 2608-2612 (Pubitemid 47522408)
25. Elfstrom, N.; Karlstrom, A. E.; Linnros, J. Silicon Nanoribbons for Electrical Detection of Biomolecules Nano Lett. 2008, 8, 945-949
26. Li, Z.; Rajendran, B.; Kamins, T. I.; Li, X.; Chen, Y.; Williams, R. S. Silicon Nanowires for Sequence-Specific DNA Sensing: Device Fabrication and Simulation Appl. Phys. A: Mater. Sci. Process. 2005, 80, 1257-1263 (Pubitemid 40454145)
27. Nair, P. R.; Alam, M. A. Design Considerations of Silicon Nanowire Biosensors IEEE Trans. Electron Devices 2007, 54, 3400-3408 (Pubitemid 350225946)
28. Nair, P. R.; Alam, M. A. Screening-Limited Response of Nanobiosensors Nano Lett. 2008, 8, 1281-1285
29. Heo, K.; Cho, E.; Yang, J.-E.; Kim, M.-H.; Lee, M.; Lee, B. Y.; Kwon, S. G.; Lee, M.-S.; Jo, M.-H.; Choi, H.-J. et al. Large-Scale Assembly of Silicon Nanowire Network-Based Devices Using Conventional Microfabrication Facilities Nano Lett. 2008, 8, 4523-4527
30. Rao, S. G.; Huang, L.; Setyawan, W.; Hong, S. Nanotube Electronics: Large-Scale Assembly of Carbon Nanotubes Nature 2003, 425, 36-37 (Pubitemid 37101707)
31. Lee, M.; Im, J.; Lee, B. Y.; Myung, S.; Kang, J.; Huang, L.; Kwon, Y. K.; Hong, S. Linker-Free Directed Assembly of High-Performance Integrated Devices Based on Nanotubes and Nanowires Nat. Nanotechnol. 2006, 1, 66-71
32. Fan, Z.; Ho, J. C.; Jacobson, Z. A.; Yerushalmi, R.; Alley, R. L.; Razavi, H.; Javey, A. Wafer-Scale Assembly of Highly Ordered Semiconductor Nanowire Arrays by Contact Printing Nano Lett. 2008, 8, 20-25 (Pubitemid 351177769)
33. Javey, A.; Nam, S.; Friedman, R. S.; Yan, H.; Lieber, C. M. Layer-by-Layer Assembly of Nanowires for Three-Dimensional, Multifunctional Electronics Nano Lett. 2007, 7, 773-777 (Pubitemid 46516064)
34. Fan, Z.; Ho, J. C.; Takahashi, T.; Yerushalmi, R.; Takei, K.; Ford, A. C.; Chueh, Y.-L.; Javey, A. Toward the Development of Printable Nanowire Electronics and Sensors Adv. Mater. 2009, 21, 3730-3743
35. Huang, Y.; Duan, X.; Wei, Q.; Lieber, C. M. Directed Assembly of One-Dimensional Nanostructures into Functional Networks Science 2001, 291, 630-633 (Pubitemid 32150417)
36. Raychaudhuri, S.; Dayeh, S. A.; Wang, D.; Yu, E. T. Precise Semiconductor Nanowire Placement through Dielectrophoresis Nano Lett. 2009, 9, 2260-2266
37. Lao, C. S.; Liu, J.; Gao, P.; Zhang, L.; Davidovic, D.; Tummala, R.; Wang, Z. L. ZnO Nanobelt/Nanowire Schottky Diodes Formed by Dielectrophoresis Alignment Across Au Electrodes Nano Lett. 2006, 6, 263-266 (Pubitemid 43382963)
38. Gao, Z.; Agarwal, A.; Trigg, A. D.; Singh, N.; Fang, C.; Tung, C. H.; Fan, Y.; Buddharaju, K. D.; Kong, J. Silicon Nanowire Arrays for Label-Free Detection of DNA Anal. Chem. 2007, 79, 3291-3297 (Pubitemid 46717159)
39. Hu, Y.; Zhou, J.; Yeh, P.-H.; Li, Z.; Wei, T.-Y.; Wang, Z. L. Supersensitive, Fast-Response Nanowire Sensors by Using Schottky Contacts Adv. Mater. 2010, 22, 3327-3332
40. Barzola-Quiquia, J.; Dusari, S.; Bridoux, G.; Bern, F.; Molle, A.; Esquinazi, P. The Influence of Ga(+) Irradiation on the Transport Properties of Mesoscopic Conducting Thin Films Nanotechnology 2010, 21, 145306
41. Gruner, G. Carbon Nanotube Transistors for Biosensing Applications Anal. Bioanal. Chem. 2006, 384, 322-335 (Pubitemid 43018090)
42. Stern, E.; Wagner, R.; Sigworth, F. J.; Breaker, R.; Fahmy, T. M.; Reed, M. A. Importance of the Debye Screening Length on Nanowire Field Effect Transistor Sensors Nano Lett. 2007, 7, 3405-3409 (Pubitemid 350216036)
43. Hermanson, G. T. In Bioconjugate Techniques, 2 nd ed.; Academic Press: New York, 2008.