Manipulation and in situ transmission electron microscope characterization of sub-100 nm nanostructures using a microfabricated nanogripper

Journal of Micromechanics and Microengineering

Volumn 20, Issue 3, 2010, Pages

  Cagliani, Alberto ^a   Wierzbicki, Rafal ^a   Occhipinti, Luigi ^b   Petersen, Dirch Hjorth ^a   Dyvelkov, Karin Nordstrøm ^a   Sardan Sukas, Özlem ^a   Herstrøm, Berit G ^a   Booth, Tim ^a   Bøggild, Peter ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

^b STMICROELECTRONICS   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ALIGNED SINGLE-WALLED CARBON NANOTUBES; BREAKDOWN CURRENTS; DIRECT TRANSFER; ELECTRICAL CONTACTS; FOCUSED ION BEAM MILLING; HIGH THROUGHPUT; IN-SITU TRANSMISSION; MICROFABRICATED; MICROFABRICATION PROCESS; MIX AND MATCH; NANOGRIPPER; NANOMANIPULATIONS; NM RESOLUTION; STRUCTURAL CHARACTERIZATION; SUB-100 NM; TEM; TRANSMISSION ELECTRON MICROSCOPE;

ELECTRIC WIRE; ELECTRON BEAMS; ELECTRON MICROSCOPES; IN SITU PROCESSING; MICROFABRICATION; NANOWIRES; POLYSILICON; SEMICONDUCTOR QUANTUM WIRES; SINGLE-WALLED CARBON NANOTUBES (SWCN); TRANSMISSION ELECTRON MICROSCOPY;

CARBON NANOTUBES;

EID: 77749340797     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/20/3/035009     Document Type: Article

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