Characterization of dielectric and acoustic properties of CSD PZT thin films at high frequencies

Journal of Electroceramics

Volumn 28, Issue 1, 2012, Pages 53-61

  Min, D ^a   Hoivik, N ^a   Hanke, U ^a  

^a UNIVERSITY OF SOUTH EASTERN NORWAY   (Norway)

Author keywords

Acoustic properties; Dielectric properties; MIM capacitor; PZT; RF technology

Indexed keywords

ACOUSTIC PARAMETERS; ACOUSTIC RESONANCE; ACOUSTIC WAVE RESONATORS; CHEMICAL SOLUTION DEPOSITION; DC BIAS VOLTAGE; ELECTROMECHANICAL COUPLING COEFFICIENTS; HIGH DIELECTRIC CONSTANTS; HIGH FREQUENCY; HIGH TUNABILITY; HIGH-DENSITY; LARGE DIELECTRIC CONSTANT; LOSS TANGENT; MEASUREMENT SETUP; MICROWAVE DIELECTRICS; MIM CAPACITORS; PZT; PZT FILM; PZT THIN FILM; RADIO FREQUENCY APPLICATIONS; RF MIM CAPACITORS; RF TECHNOLOGY; TUNABLE DEVICE; VOLTAGE TUNABILITY;

CAPACITORS; DIELECTRIC PROPERTIES; ELECTRIC FIELDS; ELECTROMECHANICAL COUPLING; LEAD; MIM DEVICES; THIN FILMS; ZIRCONIUM;

ACOUSTIC PROPERTIES;

EID: 84862216263     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-011-9677-0     Document Type: Article

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