An intrinsically switchable FBAR filter based on barium titanate thin films

IEEE Microwave and Wireless Components Letters

Volumn 19, Issue 6, 2009, Pages 359-361

  Zhu, Xinen ^a   Lee, Victor ^a   Phillips, Jamie ^a   Mortazawi, Amir ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Barium titanate (BTO); bulk acoustic wave devices; ferroelectric thin films; film bulk acoustic wave resonator (FBAR); Switchable filters

Indexed keywords

A-CENTER; BARIUM TITANATE THIN FILMS; BULK ACOUSTIC WAVE DEVICES; DC BIAS; DC BIAS VOLTAGE; FILM BULK ACOUSTIC WAVE RESONATOR (FBAR); FILTER-BASED; SWITCHABLE; SWITCHABLE FILTERS; THIN-FILM BULK ACOUSTIC WAVE RESONATOR;

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVES; ACOUSTICS; BANDPASS FILTERS; BARIUM; ELECTRIC POTENTIAL; FERROELECTRIC FILMS; FERROELECTRIC MATERIALS; FERROELECTRIC THIN FILMS; FERROELECTRICITY; OPTICAL RESONATORS; SEMICONDUCTING BISMUTH COMPOUNDS; WAVE FILTERS;

BARIUM TITANATE;

EID: 67650427109     PISSN: 15311309     EISSN: None     Source Type: Journal    
DOI: 10.1109/LMWC.2009.2020013     Document Type: Article

References (12)

1. J. Wang, Z. Ren, and C. T.-C. Nguyen, "1.156-GHz self-aligned vibrating micromechanical disk resonator," IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 51, no. 12, pp. 1607-1628, Dec. 2004.
2. H. Chandrahalim and S. A. Bhave, "Digitally-tunable mems filter using mechanically-coupled resonator array," in Proc. IEEE 21st Int. Conf. Micro Electro Mech. Syst. (MEMS'08), Jan. 13-17, 2008, pp. 1020-1023.
3. 3 thin films at microwave frequencies," Appl. Phys. Lett., vol. 85, pp. 624-626, Jul. 2005.
4. 3 films: Experiment and modeling," J. Appl. Phys., vol 99, p. 12411,2006.
5. X. Zhu, J. Phillips, and A. Mortazawi, "A dc voltage dependant switchable thin film bulk wave acoustic resonator using ferroelectric thin film," in IEEE MTT-S Int. Dig., Jun. 2007, pp. 671-674.
6. 3 films," IEEE Microw. Wireless Compon. Lett., vol. 17, no. 9, pp. 655-657, Sep. 2007.
7. 3," Appl. Phys. Lett., vol. 91, p. 043501, Jul. 2007.
8. J. Y. Park, H. C. Lee, K. H. Lee, H. M. Lee, and Y. J. Ko, "Micromachined FBAR RF filters for advanced handset applications," in Proc. 12th Int. Conf. Transducers, Solid-State Sensors, Actuators Microsyst., Jun. 2003, vol. 1, pp. 911-914.
9. D.-Y. Chen and J. Phillips, "Electric field dependence of piezoelectric coefficient in ferroelectric thin films," J. Electroceram., no. 17, pp. 613-617, 2006.
10. J. Larson, P. Bradley, S. Wartenberg, and R. Ruby, "Modified butterworth-van dyke circuit for FBAR resonators and automated measurement system," in Proc. IEEE Ultrasonic Symp., Oct. 2000, pp. 863-868.
11. R. Ruby, "Review and comparison of bulk acoustic wave FBAR, SMR technology," in Proc. IEEE Ultrason. Symp., Oct. 2007, pp. 1029-1040.
12. G. Piazza, P. J. Stephanou, and A. P. Pisano, "Piezoelectric aluminum nitride vibrating contour mode MEMS resonators," J. Microelectromech. Syst., vol. 15, no. 6, pp. 1406-1418, Dec. 2006.