Characterization of sol-gel Pb(Zr0.53Ti0.47)O 3 in thin film bulk acoustic resonators

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 55, Issue 6, 2008, Pages 1373-1379

  Conde, Janine ^b   Muralt, Paul ^a,b  

^a IEEE

^b EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

GELATION; LEAD; LEAD ALLOYS; ZIRCONIUM;

SOL - GEL;

COLLOIDS;

LEAD; LEAD TITANATE ZIRCONATE; TITANIUM; ZIRCONIUM;

ACOUSTICS; ARTICLE; CHEMICAL MODEL; CHEMISTRY; COMPUTER SIMULATION; EQUIPMENT; EQUIPMENT DESIGN; GEL; INSTRUMENTATION; MATERIALS TESTING; RADIATION EXPOSURE; TRANSDUCER; VIBRATION;

ACOUSTICS; COMPUTER SIMULATION; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; GELS; LEAD; MATERIALS TESTING; MODELS, CHEMICAL; TITANIUM; TRANSDUCERS; VIBRATION; ZIRCONIUM;

EID: 44949109990     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2008.800     Document Type: Article

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