Effects of thickness on piezoelectric properties of highly oriented lead zirconate titanate films

Journal of the American Ceramic Society

Volumn 89, Issue 7, 2006, Pages 2314-2316

  Park, Gun Tae ^a   Park, Chee Sung ^a   Choi, Jong Jin ^a   Lee, Jae Wung ^a   Kim, Hyoun Ee ^a,b  

^a Seoul National University   (South Korea)

^b AMERICAN CERAMIC SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LEAD ZIRCONATE TITANATE (PZT); POLYVINYLPYRROLIDONE (PVP); SEED LAYERS; THICKNESS DEPENDENCE;

CRACKS; DEPOSITION; LEAD COMPOUNDS; PIEZOELECTRIC MATERIALS; RESIDUAL STRESSES; SILICON; THIN FILMS;

THICKNESS MEASUREMENT;

EID: 33745301367     PISSN: 00027820     EISSN: 15512916     Source Type: Journal    
DOI: 10.1111/j.1551-2916.2006.00988.x     Document Type: Article

References (21)

1. J. F. Scott and C. A. Paz De Araujo, "Ferroelectric Memories." Science, 246, 1400-5 (1989).
2. C. A. Paz De Araujo, J. D. Cuchiaro, L. D. McMillan, M. C. Scott, and J. F. Scott, "Fatigue-Free Ferroelectric Capacitors with Platinum Electrodes," Nature, 374, 627-9 (1995).
3. D. L. Polla and L. F. Francis, "Ferroelectric Thin Films in MEMS Applications," MRS Bull., 21 [7] 59-65 (1996).
4. C. J. Kim, D. S. Yoon, J. S. Lee, and C. G. Choi, "Electrical Characteristics of (100), (111), and Randomly Aligned Lead Zirconate Titanale Thin Films," J. Appl. Phys., 76 [11] 7478-82 (1994).
5. X. Du, J. Zheng, U. Belegundu, and K. Uchino, "Crystal Orientation Dependence of Piezoelectric Properties of Lead Zirconate Titanate Near the Morphotropic Phase Boundary," Appl. Phys. Lett., 72 [19] 2421-3 (1998).
6. 3 Thin Films Deposited by The Sol-Gel Process," Thin Solid Films, 252 [1] 38-43 (1994).
7. K. R. Udayakumar, P. J. Schuele, J. Chen, S. B. Krupanidhi, and L. E. Cross, "Thickness-Dependent Electrical Characteristics of Lead Zirconate Titanate Thin Films," J. Appl. Phys., 77 [8] 3981-6 (1995).
8. L. Lian and N. R. Sottos, "Effects of Thickness on The Piezoelectric and Dielectric Properties of Lead Zirconate Titanate Thin Films," J. Appl. Phys., 87 [8] 3941-9 (2000).
9. R. D. Klissurska, K. G. Brooks, I. M. Reaney, C. Pawlaczyk, M. Kosec, and N. Setter, "Effect of Nb Doping on the Microstructure of Sol-Gel Derived PZT Thin Films," J. Am. Ceram. Soc., 78 [6] 1513-20 (1995).
10. 3," Appl. Phys. Lett., 76 [22] 3292-4 (2002).
11. T. Tuchiya, T. Itoh, G. Sasaki, and T. Suga, "Preparation and Properties of Piezoelectric Lead Zirconate Titanate Thin Films for Microsensors and Microactualors by Sol-Gel Processing," J. Ceram. Soc. Jpn., 104 [3] 159-63 (1996).
12. K. G. Brooks, I. M. Reany, R. Klissurska, Y. Huang, L. Bursill, and N. Setter, "Orientation of Rapid Thermally Annealed Lead Zirconate Titanate Thin Films on (111) Pt Substrates," J. Mater. Res., 9 [10] 2540-53 (1994).
13. S. Sun, Y. M. Wang, P. A. Fuierer, and B. A. Tuttle, "Annealing Effects on the Internal Bias Field in Ferroelectric PZT Thin Films with Self-Polarization," Int. Ferroelectric, 23, 25-43 (1999).
14. 3 Thin Films." Appl. Phys. Lett., 81 [5] 898-900 (2002).
15. 2 Seeding," J. Appl. Phys., 83 [7] 3835-41 (1998).
16. G. T. Park, C. S. Park, J. J. Choi, and H. E. Kim, "Orientation Control of Sol-Gel-Derived Lead Zirconate Titanate Film by Addition of Polyvinylpyrrolidone," J. Mater. Res., 20 [4] 882-8 (2005).
17. G. T. Park, J. J. Choi, C. S. Park, J. W. Lee, and H. E. Kim, "Piezoelectric and Ferroelectric Properties of 1-μm-Thick Lead Zirconate Titanate Film Fabricated by a Double-Spin-Coating process," Appl. Phys. Lett., 85 [12] 2322-4 (2004).
18. G. T. Park, J. J. Choi, J. Ryu, H. Fan, and H. E. Kim, "Measurement of Piezoelectric Coefficients of Lead Zirconate Tilanate Thin Films by Strain-Monitoring Pneumatic Loading Method," Appl. Phys. Lett., 80 [24] 4606-8 (2002).
19. S. S. Sengupta, S. M. Park, D. A. Payne, and L. H. Allen, "Origins and Evolution of Stress Development in Sol-Gel Derived Thin Layers and Multideposited Coating of Lead Titanate," J. Appl. Phys., 83 [4] 2291-6 (1998).
20. I. C. Noyan and J. B. Cohen, Residual Stress - Measurement by Diffraction and Interpretation. Springer-Verlag, New York, 1987.
21. F. Xu, S. Trolier-Mckinstry, W. Ren, and B. Xu, "Domain Wall Motion and its Contribution to the Dielectric and Piezoelectric Properties of Lead Zirconate Titanate Films," J. Appl. Phys., 89 [2] 1336-48 (2001).