Characterization of RF-sputtered self-polarized PZT thin films for IR sensor arrays

Vacuum

Volumn 66, Issue 3-4, 2002, Pages 473-478

  Suchaneck, G ^a   Lin, W M ^a   Koehler, R ^a   Sandner, T ^a   Gerlach, G ^a   Krawietz, R ^a   Pompe, W ^a   Deineka, A ^a   Jastrabik, L ^a  

^a DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

IR sensor arrays; Polarization and refractive index profiles; Self polarized PZT

Indexed keywords

ARRAYS; COMPOSITION; CRYSTAL MICROSTRUCTURE; ELLIPSOMETRY; HYDROSTATIC PRESSURE; INFRARED IMAGING; INTERFACES (MATERIALS); RAMAN SPECTROSCOPY; REFRACTIVE INDEX; SEMICONDUCTING LEAD COMPOUNDS; SENSORS; SPECTROSCOPIC ANALYSIS; STRESSES;

HYDROSTATIC STRESSES; SELF-POLARIZATION PROFILES;

THIN FILMS;

EID: 0037136093     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00118-5     Document Type: Article

References (21)

1. MRS fall meeting, symposiumCC