Test structures for dielectric spectroscopy of thin films at microwave frequencies

Microelectronics Reliability

Volumn 47, Issue 4-5 SPEC. ISS., 2007, Pages 682-685

  Delmonte, N ^a   Watts, B E ^b   Chiorboli, G ^a   Cova, P ^a   Menozzi, R ^a  

^a UNIVERSITY OF PARMA   (Italy)

^b IMEM CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

COPLANAR WAVEGUIDES; DIELECTRIC SPECTROSCOPY; ELECTRONIC STRUCTURE; MICROFABRICATION; MICROWAVE FREQUENCIES; PERMITTIVITY;

CAPACITOR TEST PATTERNS; CERAMIC THIN FILMS; DIELECTRIC TUNABILITY; ZIRCONIUM TITANATE;

THIN FILMS;

EID: 34247374822     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2007.01.062     Document Type: Article

References (7)

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