The microwave dielectric properties of dual-layer PZT/ZrO2 thin films deposited by chemical solution deposition

Journal of Physics D: Applied Physics

Volumn 44, Issue 25, 2011, Pages

  Min, D ^a   Hoivik, N ^a   Jensen, G U ^b   Tyholdt, F ^c   Hanke, U ^a  

^a UNIVERSITY OF SOUTH EASTERN NORWAY   (Norway)

^b SINTEF ICT   (Norway)

^c SINTEF   (Norway)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SOLUTION DEPOSITION; CHEMICAL SOLUTION DEPOSITION METHOD; DIELECTRIC CONSTANTS; DIELECTRIC LAYER; DUAL LAYER; METAL-INSULATOR-METAL CAPACITORS; MICROWAVE DIELECTRIC PROPERTIES; MILLIMETRE WAVES; MIM CAPACITORS; PZT; PZT THIN FILM; RF DEVICES; RF MEMS CAPACITIVE SWITCHES; TUNABILITIES;

CAPACITORS; CHEMICALS; COPLANAR WAVEGUIDES; DIELECTRIC LOSSES; METAL INSULATOR BOUNDARIES; MIM DEVICES; THIN FILMS; VAPOR DEPOSITION; ZIRCONIUM ALLOYS;

DEPOSITION;

EID: 79958861352     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/25/255404     Document Type: Article

References (19)

1. Setter N et al 2006 Ferroelectric thin films: review of materials, properties, and applications J. Appl. Phys. 100 051606
2. Arlt G, Bottger U and Witte S 1995 Dielectric dispersion of ferroelectric ceramics and single crystals by sound generation in piezoelectric domains J. Am. Ceram. Soc. 78 1097-100
3. 3 multilayer films derived by chemical solution deposition Appl. Phys. Lett. 87 182902
4. 2 buffer layer on an electroless Ni-coated Cu foil J. Am. Ceram. Soc. 89 3426-30 (Pubitemid 44610847)
5. 2 thin film Semicond. Sci. Technol. 24 115016
6. Lazim N F M, Awang Z, Majid Z A, Yusof A and Dollah A 2007 Improved characterization and modeling of PZT thin film capacitors Proc. 2007 Asia-Pacific Conf. on Applied Electromagnetics (Melaka, Malaysia) pp 484-8
7. Ma Z X, Becker A J, Polakos P, Huggins H, Pastalan J, Wu H, Watts K, Wong Y H and Mankiewich P 1998 RF measurement technique for characterizing thin dielectric films IEEE Trans. Electron Devices 45 1811-6 (Pubitemid 128737840)
8. 2 thin films European Microwave Conf. (EuMC) (Paris, France, 2010) pp 1579-82
9. Lue H T, Tseng T Y and Huang G W 2002 A method to characterize the dielectric and interfacial properties of metal-insulator-semiconductor structures by microwave measurement J. Appl. Phys. 91 5275-82
10. Tyholdt F, Calame F, Prume K, Raeder H and Muralt P 2007 Chemically derived seeding layer for {1 0 0}-textured PZT thin films J. Electroceram. 19 311-4 (Pubitemid 350278397)
11. Rundqvist P, Vorobiev A, Gevorgian S and Khamchane K 2004 Non-destructive microwave characterization of ferroelectric films on conductive substrates Integr. Ferroelectr. 60 1-19
12. 3 thin films J. Electroceram. 13 257-60 (Pubitemid 40493598)
13. Chentir M T, Bouyssou E, Ventura L and Anceau C 2009 Leakage current evolution versus dielectric thickness in lead zirconate titanate thin film capacitors J. Appl. Phys. 105 061605
14. 3 thin-film capacitors Appl. Phys. Lett. 63 27-9
15. Janezic M D and Jargon J A 1999 Complex permittivity determination from propagation constant measurements IEEE Microw. Guided Wave Lett. 9 76-8
16. Ouaddari M, Delprat S, Vidal F, Chaker M and Wu K 2005 Microwave characterization of ferroelectric thin-film materials IEEE Trans. Microw. Theory Tech. 53 1390-7
17. 2 interface layer effects on microwave loss of high-resistivity CPW line IEEE Microw. Guided Wave Lett. 9 10-2
18. Tony E S and Chaudhuri S K 1999 Effect of depletion layer on the propagation characteristics of MIS transmission lines IEEE Trans. Microw. Theory Tech. 47 1760-3 (Pubitemid 30501447)
19. 3 thin film coplanar phase shifters J. Appl. Phys. 99 104101