Combined microscopies study of the C-contamination induced by extreme-ultraviolet radiation: A surface-dependent secondary-electron-based model

Applied Physics Letters

Volumn 100, Issue 20, 2012, Pages

  Prezioso, S ^a   Donarelli, M ^a   Bisti, F ^a   Palladino, L ^a   Santucci, S ^a   Spadoni, S ^b   Avaro, L ^b   Liscio, A ^c   Palermo, V ^c   Ottaviano, L ^a  

^a UNIVERSITY OF L'AQUILA   (Italy)

^b Micron   (Italy)

^c CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

A-CARBON; EXTREME ULTRAVIOLET RADIATIONS; EXTREME ULTRAVIOLETS; HYDROCARBON MOLECULES; KELVIN PROBE FORCE MICROSCOPY; M-SCALE; SCANNING ELECTRONS;

ATOMIC FORCE MICROSCOPY; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY;

ULTRAVIOLET RADIATION;

EID: 84861808512     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4714774     Document Type: Article

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