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Review of Scientific Instruments

Volumn 81, Issue 4, 2010, Pages

A study of the mechanical vibrations of a table-top extreme ultraviolet interference nanolithography tool

(5) Prezioso, S a De Marco, P a Zuppella, P b Santucci, S a Ottaviano, L a

a UNIVERSITY OF L'AQUILA (Italy)

b INFM (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EXTREME ULTRAVIOLET; EXTREME ULTRAVIOLET LASERS; INTERFERENCE PATTERNS; LABORATORY SCALE; LASER SOURCES; LATERAL RESOLUTION; LITHOGRAPHIC SYSTEMS; LLOYD'S MIRROR; LOW COSTS; MECHANICAL PARTS; MECHANICAL VIBRATIONS; MODULATION AMPLITUDES; PATTERN PROFILE; PHYSICAL RESOLUTION; PULSE DURATIONS; SCALING DOWN; STATISTICAL MODELS; TABLE-TOP; VIBRATION DYNAMICS;

EXTREME ULTRAVIOLET LITHOGRAPHY; NANOLITHOGRAPHY; NORMAL DISTRIBUTION; PULSED LASER APPLICATIONS; ULTRAVIOLET DEVICES; ULTRAVIOLET LASERS;

VIBRATIONS (MECHANICAL);

EID: 77952406654 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3384303 Document Type: Article

Times cited : (8)

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- The case of 45 nm spaced grooves has been excluded from this analysis because, breaking the regularity of the experimental curve for reasons uto here unknown, it could represent a misleading element
- The case of 45 nm spaced grooves has been excluded from this analysis because, breaking the regularity of the experimental curve for reasons up to here unknown, it could represent a misleading element.

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