Modeling radiation-induced carbon contamination of extreme ultraviolet optics

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 1, 2006, Pages 64-82

  Hollenshead, Jeromy ^a   Klebanoff, Leonard ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON CONTAMINATION; EXTREME ULTRAVIOLET (EUV) OPTICS; MULTILAYER OPTICS;

CARBON; CHEMICAL BONDS; DIFFUSION; ELECTRIC EXCITATION; IONIZATION; MATHEMATICAL MODELS; RADIATION EFFECTS;

ULTRAVIOLET RADIATION;

EID: 31544463592     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2140005     Document Type: Article

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