Micropositioning

Piezoelectric and Acoustic Materials for Transducer Applications

Volumn , Issue , 2008, Pages 319-340

  Juuti, J ^a   Leinonen, M ^a   Jantunen, H ^a  

^a UNIVERSITY OF OULU   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84861182801     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-0-387-76540-2_16     Document Type: Chapter

References (67)

1. Adda C, Laurent GJ, Le Fort-Piat N (2005) Learning to control a real micropositioning system in the STM-Q framework. In: Proc 2005 IEEE Int Conf Robotics and Automation, IEEE, Piscataway, NJ, 4569-4574.
2. Allahverdi M, Danforth SC, Jafari M, Safari A (2001) Processing of advanced electroceramic components by fused deposition technique. J Eur Ceram Soc 21: 1485-1490.
3. Aloisi G, Santucci A, Carla M, Dolci D, Lanzi L (2006) Electronic linearization of piezoelectric actuators and noise budget in scanning probe microscopy. Rev Sci Instrum 77: 073701.
4. Ang WT, Garḿon A, Khosla PK, Riviere CN (2003) Modeling rate-dependent hysteresis in piezoelectric actuators. In: Proc 2003 IEEE/RSJ Int Conf Intelligent Robots and Systems, IEEE, Piscataway, NJ, 1975-1980.
5. Bexell M, Johansson S (1999) Characteristics of a piezoelectric miniature motor. Sens Actuator A Phys 75: 118-130.
6. Canon Inc. (2006) EF lens work III. http://www.canon-europe.com/support/ documents/digital slr educational tools/en/ef lens work iii en asp (accessed 14 March 2007
7. Choi HD, Kim JH, Kim S, Kwak YK (2005) Development of the piezoelectric motor using momentum generated by bimorphs. Rev Sci Instrum 76: 105109.
8. Chopra I (2002) Review of state of art of smart structures and integrated systems. AIAA J 40(11): 2145-2187.
9. Comstock RH (1981) Charge control of piezoelectric actuators to reduce hysteresis effects. U.S. Patent 4,263,527.
10. Davis M, Damjanovic D, Hayem D, Setter N (2005) Domain engineering of the transverse piezoelectric coefficient in perovskite ferroelectrics. J Appl Phys 98: 014102.
11. DavisM, Damjanovic D, Setter N (2006) Temperature dependence of the direct piezoelectric effect in relaxor-ferroelectric single crystals: Intrinsic and extrinsic contributions. J Appl Phys 100: 084103.
12. Dinulovic D, Gatzen HH (2006) Microfabricated inductive micropositioning sensor for measurement of a linear movement. IEEE Sens J 6(6): 1482-1487.
13. Dynamic Structures & Materials LLC, Catalog. http://www.dynamic- structures.com/piezo actuators.html (accessed 13 March 2007
14. Feddema JT, Simon RW (1998) Visual servoing and CAD-driven microassembly. IEEE Robot Autom Mag 5(4): 18-24.
15. Furuta A, Munekata M, Higuchi T (2002) Precise positioning stage driven by multilayer piezo actuator using strain gauge. Jpn J Appl Phys 41: 6283-6286.
16. Germano C (1971) Flexure mode piezoelectric transducers. IEEE Trans Audio Electroacoust 19(1): 6-12.
17. Giessibl FJ (2003) Advances in atomic force microscopy. Rev Mod Phys 75(3): 949-982.
18. Haertling GH (1994) Rainbow ceramics-A new type of ultra-high- displacement actuator. Am Ceram Soc Bull 73(1): 93-96.
19. Haertling GH (1997) Rainbow actuators and sensors: A new smart technology. In: Proc SPIE Int Soc for Optical Eng, SPIE, Bellingham, WA, 3040: 81-92.
20. Haertling GH (1999) Ferroelectric ceramics: History and technology. J Am Ceram Soc 82(4): 797-818.
21. Harb S, Smith ST, Chetwynd DG (1992) Subnanometer behavior of a capacitive feedback, piezoelectric displacement actuator. Rev Sci Instrum 63(2): 1680-1689. http://konicaminolta.com/about/research/core technology/picture/ antiblur.html (accessed 8 February 2007).
22. http://www.hexapods.net (accessed 18 April 2007
23. Hubbard NB, Culpepper ML, Howell LL (2006) Actuators for micropositioners and nanopositioners. Appl Mech Rev 59(6): 324-334.
24. Kallio P, Lind M, Kojola H, Zhou Q, Koivo HN (1996) An actuation system for parallel link micromanipulators. In: Proc 1996 IEEE/RJS Int Conf Intelligent Robots and System, IEEE, New York, 2: 856-862.
25. Kallio P, Zhou Q, Koivo HN (1998) Control issues in micromanipulation. In: Proc 1998 Int Symp Micromechatronics and Human Science, IEEE, Piscataway, NJ, 135-141.
26. Kim KY, Park KH, Park HC, Goo NS, Yoon KJ (2005) Performance evaluation of lightweight piezo-composite actuators. Sens Actuator A Phys 120: 123-129.
27. Ko H-P, Kang C-Y, Kim J-S, Borodin SN, Kim S, Yoon S-J (2006) Constructions and characteristics of a tiny piezoelectric linear motor using radial mode vibrations. J Electroceram 17: 603-608.
28. Ku S-S, Pinsopon U, Cetinkunt S, Nakajima S-I (2000) Design, fabrication, and real-time neural network control of a three-degrees-of-freedom nanopositioner. IEEE-ASME Trans Mechatron 5(3): 273-280.
29. Li G, Furman E, Haertling GH (1997) Stress-enhanced displacements in PLZT Rainbow actuators. J Am Ceram Soc 80(6): 1382-1388.
30. Li X, Shih WY, Aksay IA (1999) Electromechanical behaviour of PZT-brass unimorphs. J Am Ceram Soc 82(7): 1733-1740.
31. Lv Y, Wei Y (2004) Study on open-loop precision positioning control of a micropositioning platform using a piezoelectrical actuator. In: Proc Fifth World Congress on Intelligent Control and Automation, IEEE, Piscataway, 1255-1259.
32. MacLachlan BJ, Elvin N, Blaurock C, Keegan NJ (2004) Piezoelectric valve actuator for flexible diesel operation. In: Proc SPIE Int Soc Optical Eng, SPIE, Bellingham WA, 5388: 167-178.
33. May WG (1975) Piezoelectric electromechanical translation apparatus. U.S. Patent 3,902,084.
34. Morozov M, Damjanovic D, Setter N (2005) The nonlinearity and subswitching hysteresis in hard and soft PZT. J Eur Ceram Soc 25: 2483-2486.
35. 3 plates by heat treatment. Appl Phys Lett 50(20): 1413-1414.
36. Niezrecki C, Brei D, Balakrishnan S, Moskalik A (2001) Piezoelectric actuation: State of the art. Shock Vib Dig 33(4): 269-280.
37. Park SE, Shrout TR (1997) Ultrahigh strain and piezoelectric behaviour in relaxor based ferroelectric single crystals. J Appl Phys 82: 1804-1811.
38. Park T, Kim B, KimM-H, Uchino K (2002) Characteristics of the first longitudinal-fourth bending mode linear ultrasonic motors. Jpn J Appl Phys 41: 7139-7143.
39. Pearce DH, Hooley A, Button TW (2002) On piezoelectric super-helix actuators. Sens Actuator A Phys 100: 281-286.
40. PI GmbH & Co (2001) Micropositioning, nanopositioning, nanoautomation solutions for cuttingedge technologies. PI catalog. Piezo Systems Inc. (2006) Catalog no. 7. http://www.piezo.com (accessed 13 March 2007
41. Piezomechanik GmbH (2006) Catalogs. http://www.piezomechanik.com (accessed 13 March 2007
42. Piezosystem jena GmbH Datasheets. http://www.piezojena.com (accessed 13 March 2007
43. Pons JL, Rocon E (2006) Scaling of piezoelectric actuators: A comparision with traditional and other technologies. Bol Soc Esp Ceram Vidr 45(3): 132-138.
44. Randall CA, Kelnberger A, Yang GY, Eitel RE, Shrout TR (2005) High strain piezoelectric multilayer actuators-A material science and engineering challenge. J Electroceram 14: 177-191.
45. Ronkanen P, Kallio P, Koivo H (2002) Current control of piezoelectric actuators with power loss compensation. In: Proc 2002 IEEE/RSJ Int Conf Intelligent Robots and System, IEEE, Piscataway, NJ, 2: 1948-1953.
46. Ru C-H, Sun L, KongM-X (2005) Adaptive inverse control for piezoelectric actuator based on hysteresis model. In: Proc Fourth Int Conf Machine Learning and Cybernetics, IEEE, Piscataway, NJ, 3189-3193.
47. Sacconi A, Picotto GB, Pasin W (1999) The IMGC calibration setup for microdisplacement actuators. IEEE Trans Instrum Meas 48(2): 483-487.
48. Sawyer CB (1931) Piezoelectric device. U.S. Patent 1,802,782.
49. Schaller R, Fantozzi G, Gremaud G (2001) Mechanical spectroscopy Q-1 2001: With applications to materials science. In: Materials Science Forum, vol. 366-368, Trans Tech, Switzerland.
50. Schwartz RW, Moon Y-W (2001) Domain configuration and switching contributions to the enhanced performance of Rainbow actuators. In: Proc Int Soc Optical Eng, SPIE, Bellingham WA, 4333: 408-417.
51. Schwartz RW, Cross LE, Wang QM (2001) Estimation of the effective d31 coefficients of the piezoelectric layer in rainbow actuators. J Am Ceram Soc 84(11): 2563-2569.
52. Shen G,Wei Y (2006) Study on nonlinear model of piezoelectric actuator and accurate positioning control strategy. In: Proc Sixth World Congress on Intelligent Control and Automation, IEEE, Piscataway, NJ, 8356-8360.
53. Spanner K (2006) Survey of the various operating principles of ultrasonic piezomotors. White paper available at http://www.piusa.us/technotes/ actuator2006 surveyofthevariousoperatingprinciplesofultrasonicpiezomotors c.pdf.
54. Sun L, Ru C, RongW(2004) Hysteresis compensation for piezoelectric actuator based on adaptive inverse control. In: Proc Fifth World Congress on Intelligent Control and Automation, IEEE, Piscataway, NJ, 5036-5039.
55. Tan KK, Ng SC, Huang SN (2004) Assisted reproduction system using piezo actuator. In: Proc Int Conf Communications, Circuits and Systems IEEE, Piscataway, NJ, 2: 1200-1203.
56. Tenzer PE, Mrad RB (2004) On amplification in inchworm precision positioners. Mechatronics 14: 515-531.
57. Uchino K (1997) Piezoelectric actuators and ultrasonic motors. Kluwer Academic, Boston.
58. Uchino K (1998) Piezoelectric ultrasonic motors: Overview. Smart Mater Struct 7: 273-285.
59. Uchino K, Yoshizaki M, Kasai K, Yamamura H, Sakai N, Asakura H (1987) "Monomorph actuators" using semiconductive ferroelectrics. Jpn J Appl Phys 26(7): 1046-1049.
60. Uchino K, Cagatay S, Koc B, Dong S, Bouchilloux P, Strauss M (2004) Micro piezoelectric ultrasonic motors. J Electroceram 13: 393-401.
61. Veeco Instruments Inc. (2003) SPM Training Notebook 004-130-00 Revision E. Veeco Instruments Inc. (2004) Dimension 3100 Manual Revision D.
62. Wang Q-M, Cross LE (1998) Determination of Young's modulus of the reduced layer of a piezoelectric RAINBOW actuator. J Appl Phys 83 (10): 5358-5363.
63. Wang Q-M, Cross LE (1999) Tip deflection and blocking force of soft PZT-based cantilever RAINBOW actuators. J Am Ceram Soc 82(1): 103-110.
64. Wolff A, Cramer D, Hellebrand H, Probst I, Lubitz K (1994) Optical two channel elongation measurement of PZT piezoelectric multilayer stack actuators. In Proc Ninth IEEE Int Symp Appl Ferroelectrics, IEEE, New York, pp 755-757.
65. Wolny WW (2000) Piezoceramic thick films-Technology and applications state of the art in Europe. In: Proc IEEE 12th Int Symp Appl Ferroelectrics, IEEE, Piscataway, NJ, 1: 257-262.
66. Yanagihara H, Sato Y, Mizuta J (1997) A study of DI diesel combustion under uniform higherdispersed mixture formation. JSAE Rev 18(3): 247-254.
67. Zhang QM, Zhao J (1999) Electromechanical properties of lead zirconate titanate piezoceramics under the influence of mechanical stresses. IEEE Trans Ultrason Ferroelectr Freq Control 46(6): 1518-1526.