Microfabricated inductive micropositioning sensor for measurement of a linear movement

IEEE Sensors Journal

Volumn 6, Issue 6, 2006, Pages 1482-1487

  Dinulovic, Dragan ^a,b   Gatzen, Hans H ^a,b  

^a IEEE   (Germany)

^b LEIBNIZ UNIVERSITY HANNOVER   (Germany)

Author keywords

Inductive devices; Linear movement; Microelectro mechanical system (MEMS); Micropositioning sensor; Microtransformer; Variable reluctance (VR) sensor

Indexed keywords

INDUCTIVE DEVICES; LINEAR MOVEMENT; MICROPOSITIONING SENSOR; MICROTRANSFORMER; VARIABLE RELUCTANCE (VR) SENSOR;

INDUCTANCE; LINEAR SYSTEMS; MEASUREMENT THEORY; MICROELECTROMECHANICAL DEVICES; MOTION ESTIMATION; SIGNAL PROCESSING;

MICROSENSORS;

EID: 33845622464     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2006.884439     Document Type: Article

References (12)

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