The IMGC calibration setup for microdisplacement actuators

IEEE Transactions on Instrumentation and Measurement

Volumn 48, Issue 2, 1999, Pages 483-487

  Sacconi, Attilio ^a   Picotto, Gian Bartolo ^a   Pasin, Walter ^a  

^a Istituto di Metrologia Gustavo Colonnetti   (Italy)

Author keywords

Calibration; Laser interferometry; Microactuators; Piezoelectric transducers

Indexed keywords

EID: 2342641877     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.769635     Document Type: Article

References (8)

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