Characteristics of a piezoelectric miniature motor

Sensors and Actuators, A: Physical

Volumn 75, Issue 2, 1999, Pages 118-130

  Bexell, M ^a   Johansson, S ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; CERAMIC MATERIALS; ELECTRIC MOTORS; LINEAR CONTROL SYSTEMS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MOTION CONTROL; PIEZOELECTRIC TRANSDUCERS; ROTATION; TORQUE; VELOCITY CONTROL;

MICROASSEMBLY; MINIATURE MOTORS; PIEZOELECTRIC INCHWORM MOTORS; PIEZOMOTORS;

MICROACTUATORS;

EID: 0032672441     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00018-7     Document Type: Article

References (14)

1. H. Lehr, S. Abel, J. Döpper, W. Ehrfeld, B. Hagermann, K.-P. Kämpfer, F. Michel, Ch. Thüringen, Microactuators as driving units for microrobotic systems, Proc. SPIE, Microrobotics: Components and Applications, Vol. 2906, Boston, Massachusetts (1996) 202-210.
2. W. Vishnewsky, R. Glöß, Piezoelectric rotary motors, Proc. Actuator 96, Bremen, Germany, 1996, pp. 245-248.
3. Itoh T. Micro-machine technology tackles challenge of motor miniaturisation. Journal of Electronic Engineering. 30(313):1993;58-62.
4. K. Nakamura, H. Ogura, S. Maeda, U. Sangawa, S. Aoki, T. Sato, Evaluation of the microwobble motor fabricated by concentric build-up process, Proc. MEMS, 1995, pp. 374-379.
5. T. Sato, Step from 2- to 3-D process breaks ground for microfabricated wobble motors, Journal of Electronic Engineering, 31 (332) (1994) 67-70, 80.
6. M. Bexell, S. Johansson, A high torque miniature inchworm motor, Proc. Transducers '95, Late News Contributions (1995) 69-70.
7. S. Johansson, Piezomotor, Swedish Patent Appl. No. S 9300305-1, 1993.
8. Bexell M., Tiensuu A.-L., Schweitz J.-Å., Söderberg J., Johansson S. Characterisation of an inchworm prototype motor. Sensors and Actuators A. 43:1994;322-329.
9. Smits J.G. Design considerations of a piezoelectric-on-silicon microrobot. Sensors and Actuators A. 35:1992;129-135.
10. J.G. Smits, Integrated micromechanical piezoelectric motor, US Patent No. 5049775, 1991.
11. K. Mori, Piezoelectric Rotary Actuator, US Patent No. 4468583, 1984.
12. S. Uhea, Y. Tomikawa, Ultrasonic motors - theory and applications, Oxford Univ. Press, 1993.
13. Johansson S. One approach towards the fabrication of a microrobot system. Materials Science and Engineering C. 2:1995;141-149.
14. Ferroperm A/S Denmark, product catalogue, 1995.