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Volumn 77, Issue 7, 2006, Pages
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Electronic linearization of piezoelectric actuators and noise budget in scanning probe microscopy
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Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTIC NOISE;
MICROSCOPES;
OPTICAL RESOLVING POWER;
PIEZOELECTRIC DEVICES;
PROBES;
SCANNING;
ELECTRONIC NOISE;
PIEZOELECTRIC ACTUATORS;
SCANNING ELECTROCHEMICAL MICROSCOPE;
SCANNING PROBE MICROSCOPY;
ACTUATORS;
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EID: 33746851500
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.2213214 Document Type: Article |
Times cited : (9)
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References (17)
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