Precise positioning stage driven by multilayer piezo actuator using strain gauge

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 10, 2002, Pages 6283-6286

  Furuta, Atsushi ^a   Munekata, Mutsuo ^a   Higuchi, Toshiro ^b  

^a JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^b UNIVERSITY OF TOKYO   (Japan)

Author keywords

Bridge circuit; Cr N; Displacement sensor; Gauge factor; Gauge resistance; Multilayer piezo actuator; PID servo control; Positioning stage; Sputtering; Strain gauge; Thin film

Indexed keywords

ADHESIVES; PIEZOELECTRIC DEVICES; SENSITIVITY ANALYSIS; SENSORS; SERVOMECHANISMS; SPUTTERING; STRAIN GAGES; THIN FILMS; VOLTAGE MEASUREMENT; ZIRCONIA;

JOULE HEAT; MULTILAYER PIEZO ACTUATOR; NICKEL COPPER FOIL TYPE; POSITIONING STAGE;

ACTUATORS;

EID: 0036818942     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.6283     Document Type: Article

References (2)

1. Y. Sasaki, E. Niwa, M. Honma and T. Masumoto: Collected Abstr. 1997 Autumn Meet. Japan Institute of Metals.
2. E. Niwa, Y. Sasaki, M. Honma and T. Masumoto: to be published in J. Jpn. Inst. Met.