Application of floating microwave resonator probe to the measurement of electron density in electronegative capacitively coupled plasma

Wuli Xuebao/Acta Physica Sinica

Volumn 61, Issue 7, 2012, Pages

  Zou, Shuai ^a   Tang, Zhong Hua ^a   Ji, Liang Liang ^a   Su, Xiao Dong ^a   Xin, Yu ^a  

^a SOOCHOW UNIVERSITY   (China)

Author keywords

Electron density; Electronegative plasma; Microwave resonance probe

Indexed keywords

EID: 84860341553     PISSN: 10003290     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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