Wave cutoff method to measure absolute electron density in cold plasma

Review of Scientific Instruments

Volumn 75, Issue 8, 2004, Pages 2706-2710

  Kim, Jung Hyung ^a   Choi, Sang Chul ^a,b   Shin, Yong Hyeon ^a   Chung, Kwang Hwa ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

^b LOT Vacuum Co Ltd   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; DEPOSITION; DISPERSIONS; ELECTRODES; ELECTROMAGNETIC WAVE PROPAGATION; MAGNETIC FIELDS; MICROWAVES; OSCILLATIONS; PERTURBATION TECHNIQUES; PLASMA DENSITY; REFRACTIVE INDEX; THIN FILMS;

FILM DEPOSITION; ION SATURATION CURRENT; PLASMA FREQUENCY; WAVE CUTOFF METHOD;

CARRIER CONCENTRATION;

EID: 4944267019     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1771487     Document Type: Article

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