Large-area multicrystalline silicon solar cell fabrication using reactive ion etching (RIE)

Solar Energy Materials and Solar Cells

Volumn 95, Issue 1, 2011, Pages 2-6

  Yoo, Jinsu ^a   Yu, Gwonjong ^a   Yi, Junsin ^b  

^a Korea Institute of Energy Research (KIER)   (South Korea)

^b Sungkyunkwan University   (South Korea)

Author keywords

Light trapping; Multicrystalline silicon; Reactive ion etching; Solar cell; Surface texturing

Indexed keywords

ANTI-REFLECTION; CRYSTALLINE SILICON WAFERS; FILL FACTOR; HIGH EFFICIENCY; LIGHT-TRAPPING; LOW COSTS; MASK LESS; MULTI-CRYSTALLINE SILICON; MULTI-CRYSTALLINE SILICON SOLAR CELLS; MULTICRYSTALLINE SILICON (MC-SI); PLASMA SURFACE TEXTURING; PROCESSING STEPS; REACTIVE ION; SURFACE REFLECTANCE; SURFACE TEXTURING;

ACIDS; ANTIREFLECTION COATINGS; CONVERSION EFFICIENCY; IONS; OPEN CIRCUIT VOLTAGE; POLYSILICON; POTASSIUM HYDROXIDE; SEMICONDUCTING SILICON COMPOUNDS; SILICON SOLAR CELLS; SILICON WAFERS; SOLAR CELLS; TEXTURING;

REACTIVE ION ETCHING;

EID: 78149357120     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2010.03.029     Document Type: Conference Paper

References (13)

1. T. Yagi, Y. Uraoka, and T. Fuyuki Ray-trace simulation of light trapping in silicon solar cell with texture structures, Sol. Energy Mater. Sol. Cells 90 2006 2647 2656
2. E. Fornies, C. Zaldo, and J.M. Albella Control of random texture of monocrystalline silicon cells by angle-resolved optical reflectance, Sol. Energy Mater. Sol. Cells 87 2005 583 593
3. J.M. Rodriguez, I. Tobias, and A. Luque Random pyramidal texture modelling, Sol. Energy Mater. Sol. Cells 45 1997 241 253
4. Z. Xi, D. Yang, and D. Que Texturization of monocrystalline silicon with tribasic sodium phosphate, Sol. Energy Mater. Sol. Cells 77 2003 255 263
5. H. Shota, M. Takashi, T. Hideyuki, and H. Yoshihiro Influence of texture feature size on spherical silicon solar cells, Rare Met. 25 2006 115
6. S. Narayanan Ph.D. Dissertation May, 1989 University of New South Wales Sydney, Australia
7. P. Path, G. Wileke, E. Bucher, J. Szlufcic, R.M. Murti, K. De Clercq, J. Nijs, and R. Mertens Mechanical wafer engineering for high efficiency solar cells: An investigation of the induced surface damage, Proc. 24th IEEE Photovoltaic Specialist Conf. 1994 1347
8. J. Zhao, A. Wang, M.A. Green, and F. Ferrazza 19.8% Efficient 'Honeycomb' textured multicrystalline and 24.4% monocrystalline silicon solar cells, Appl. Phys. Lett. 73 1998 1991
9. R.R. Bilyalov, L. Stalmans, and L. Schirone Use of porous silicon antireflection coating in multicrystalline silicon solar cell processing, IEEE Trans. Electron Devices 46 1999 2035 2040
10. H. Jansen, M.D. Boer, and R. Legtenberg The black silicon method: a universal method for determing parameter settings of a fluorine-based reactive ion etcher in deep silicon trench etching with profile control, J. Micromech. Microeng. 5 1995 115 120
11. W.A. Nositschka, C. Beneking, O. Voigt, and H. Kurz Texturisation of multicrystalline silicon wafer for solar cells by reactive ion etching through colloidal masks, Sol. Energy Mater. Sol. Cells 76 2 2003 155 166
12. 2 plasmas, J. Vac. Sci. Technol. B15 1997 397
13. G. Kumaravelu, M.M. Alkaisi, and A. Biattar Texturing for silicon solar cells using reactive ion etching technique, Proc. 29th IEEE Photovoltaic Specialists Conf. 2002 258 260