Advanced high-pressure plasma diagnostics with hairpin resonator probe surrounded by film and sheath

Chinese Physics B

Volumn 19, Issue 7, 2010, Pages

  Xu, Jin Zhou ^a   Shi, Jian Jun ^a   Zhang, Jing ^a   Zhang, Qi ^b   Nakamura, Keji ^b   Sugai, Hideo ^b  

^a DONGHUA UNIVERSITY   (China)

^b CHUBU UNIVERSITY   (Japan)

Author keywords

Hairpin resonator probe; High pressure plasma; Simulation; Transmission line model

Indexed keywords

ACCURATE MEASUREMENT; ANALYTIC MODELS; CORRECTION FACTORS; ELECTRON DENSITIES; FINITE DIFFERENCE TIME DOMAIN SIMULATIONS; HAIRPIN RESONATOR; HAIRPIN RESONATOR PROBE; HIGH PRESSURE; HIGH-PRESSURE PLASMA; MICROWAVE RESONANCE; NON EQUILIBRIUM; SIMULATION; THIN DIELECTRIC LAYER; TRANSMISSION LINE MODEL;

COMPUTER SIMULATION; ELECTRIC LINES; ELECTROMAGNETIC FIELDS; ELECTROMAGNETIC WAVE EMISSION; FINITE DIFFERENCE TIME DOMAIN METHOD; PLASMA DIAGNOSTICS; PLASMAS; PROBES; RESONATORS; TRANSMISSION LINE THEORY;

ELECTRIC DISCHARGES;

EID: 78649236611     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/19/7/075206     Document Type: Article

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