Indentation-induced mechanical deformation behaviors of AlN thin films deposited on c -plane sapphire

Journal of Nanomaterials

Volumn 2012, Issue , 2012, Pages

  Jian, Sheng Rui ^a   Juang, Jenh Yih ^b  

^a I SHOU UNIVERSITY   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ALN THIN FILMS; C-PLANE SAPPHIRE SUBSTRATES; CONTACT STIFFNESS; CRACKING PATTERNS; CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; DEFORMATION BEHAVIOR; DEFORMATION MECHANISM; HELICON SPUTTERING METHODS; LOAD-DISPLACEMENT CURVE; MAXIMUM LOAD; MECHANICAL DEFORMATION; NANOINDENTERS; PLANE SAPPHIRE; PYRAMIDAL PLANES; SLIP BAND; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; DEFORMATION; LOADING; MECHANICAL PROPERTIES; NANOINDENTATION; TRANSMISSION ELECTRON MICROSCOPY;

THIN FILMS;

EID: 84859805431     PISSN: 16874110     EISSN: 16874129     Source Type: Journal    
DOI: 10.1155/2012/914184     Document Type: Article

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