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Applied Physics Letters

Volumn 97, Issue 17, 2010, Pages

Mechanical response of GaN film and micropillar under nanoindentation and microcompression

(4) Sung, T H a Huang, J C a Hsu, J H a Jian, S R b

a NATIONAL SUN YAT SEN UNIVERSITY (Taiwan)

b I SHOU UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSIVE YIELD STRESS; DEFECT ACCUMULATION; DEPOSITED FILMS; GAN FILM; MECHANICAL RESPONSE; MICRO PILLARS; MICRO-SCALES; MICROCOMPRESSION; OPTICAL PERFORMANCE; RAMAN SPECTRUM; TRANSMISSION ELECTRON MICROSCOPY OBSERVATION; YOUNG'S MODULUS;

GALLIUM ALLOYS; GALLIUM NITRIDE; NANOINDENTATION; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; TRANSMISSION ELECTRON MICROSCOPY; YIELD STRESS;

MECHANICAL PROPERTIES;

EID: 78149432936 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3506498 Document Type: Article

Times cited : (28)

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