Berkovich nanoindentation and deformation mechanisms in GaN thin films

Applied Surface Science

Volumn 254, Issue 7, 2008, Pages 1997-2002

  Tsai, Chien Huang ^a   Jian, Sheng Rui ^b   Juang, Jenh Yih ^c  

^a NAN KAI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b I SHOU UNIVERSITY   (Taiwan)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

Focused ion beam; GaN; Micro Raman spectroscopy; MOCVD; Multiple pop ins; Nanoindentation; Transmission electron microscopy

Indexed keywords

DEFORMATION; FOCUSED ION BEAMS; GALLIUM NITRIDE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NANOINDENTATION; PHASE TRANSITIONS; RAMAN SPECTROSCOPY;

CROSS-SECTIONAL TRANSMISSION ELECTRON MICROSCOPY; MICRO RAMAN SPECTROSCOPY; MULTIPLE POP-INS;

THIN FILMS;

EID: 37749003793     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.08.022     Document Type: Article

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