Nanoindentation-induced deformation behaviour of diamond-like carbon coatings on silicon substrates

Thin Solid Films

Volumn 515, Issue 3, 2006, Pages 1000-1004

  Haq, Ayesha J ^a   Munroe, P R ^a   Hoffman, M ^a   Martin, P J ^b   Bendavid, A ^b  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b CSIRO   (Australia)

Author keywords

Deformation; Diamond like carbon; Focussed ion beam microscopy; Nanoindentation

Indexed keywords

CARBON; CRACKS; DEFORMATION; DIAMONDS; INDENTATION; PHASE TRANSITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POWDER COATINGS; SILICON;

DIAMOND-LIKE CARBON (DLC) COATINGS; FOCUSSED ION BEAM MICROSCOPY; MECHANICAL BEHAVIOR; SILICON SUBSTRATES;

DIAMOND LIKE CARBON FILMS;

EID: 33750441527     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.07.074     Document Type: Article

References (23)

1. Lettington A.H. Carbon 36 (1998) 555
2. Robertson J. Mater. Sci. Eng., R 37 (2002) 129
3. Bhushan B. Diamond Relat. Mater. 8 (1999) 1985
4. Savvides N., and Bell T.J. J. Appl. Phys. 72 (1992) 2791
5. Chowdhury S., Laugier M.T., and Rahman I.Z. Thin Solid Films 468 (2004) 149
6. Staedler T., and Schiffmann K. Surf. Sci. 482-485 (2001) 1125
7. Beake B.D., and Lau S.P. Diamond Relat. Mater. 14 (2005) 1535
8. Bradby J.E., Williams J.S., Wong-Leung J., Swain M.V., and Munroe P. Appl. Phys. Lett. 77 (2000) 3749
9. Bradby J.E., Williams J.S., Wong-Leung J., Swain M.V., and Munroe P. J. Mater. Res. 16 (2001) 1500
10. Zarudi I., and Zhang L.C. Tribol. Int. 32 (1999) 701
11. Zarudi I., Zhang L.C., and Swain M.V. J. Mater. Res. 18 (2003) 758
12. Domnich V., and Gogotsi Y. Rev. Adv. Mater. Sci. 3 (2002) 1
13. Li X., Diao D., and Bhushan B. Acta Mater. 45 (1997) 4453
14. Li X., and Bhushan B. Thin Solid Films 315 (1998) 214
15. Michler J., and Blank E. Thin Solid Films 381 (2001) 119
16. Xu Z., and Rowcliffe D. Surf. Coat. Technol. 161 (2002) 44
17. Cairney J.M., Munroe P.R., and Hoffman M. Surf. Coat. Technol. 198 (2005) 165
18. Cairney J.M., Smith R.D., and Munroe P.R. Microsc. Microanal. 6 (2000) 452
19. Ferrari A.C., and Robertson J. J. Phys. Rev., B 61 (2000) 14095
20. Casiraghi C., Piazza F., Ferrari A.C., Grambole D., and Robertson J. Diamond Relat. Mater. 14 (2005) 1098
21. Stoneham A.M., Godwin P.D., Sutton A.P., and Bull S.J. Bull. Appl. Phys. Lett. 72 (1998) 3142
22. Peng X.L., and Clyne T.W. Thin Solid Films 312 (1998) 207
23. Juliano T., Domnich V., and Gogotsi Y. J. Mater. Res. 19 (2004) 3099