Mechanically coupled CMOS-MEMS free-free beam resonator arrays with enhanced power handling capability

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 59, Issue 3, 2012, Pages 346-357

  Li, Ming Huang ^a   Chen, Wen Chien ^a   Li, Sheng Shian ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS-MEMS; COUPLED ARRAYS; COUPLING ELEMENT; ELECTRICAL CONFIGURATIONS; FREE-FREE BEAM; HIGH POWER HANDLING CAPABILITY; HIGH VELOCITY; MECHANICAL LINKS; MOTIONAL IMPEDANCE; POWER-HANDLING CAPABILITY; PULL-IN; QUALITY FACTOR Q; REDUCTION MECHANISMS; SHORT STUB; SPURIOUS MODES;

OPTICAL RESONATORS;

CRYSTAL RESONATORS;

EID: 84859700831     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2012.2203     Document Type: Conference Paper

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