Mechanically-coupled CMOS-MEMS free-free beam resonator arrays with two-port configuration

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2011, Pages

  Li, Ming Huang ^a   Chen, Wen Chien ^a   Li, Sheng Shian ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAY DESIGN; CMOS-MEMS; COUPLING ELEMENT; DESIGN FLEXIBILITY; ELECTRICAL CONFIGURATIONS; FEED THROUGH; FREE-FREE BEAM; HIGH POWER HANDLING CAPABILITY; HIGH VELOCITY; MECHANICAL LINKS; MOTIONAL IMPEDANCE; PERFORMANCE IMPROVEMENTS; POWER HANDLING; PULL-IN; QUALITY FACTOR Q; REDUCTION MECHANISMS; RESONATOR ARRAYS; SHORT STUB; SPURIOUS MODES;

DESIGN; OPTICAL RESONATORS;

CRYSTAL RESONATORS;

EID: 80155201666     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FCS.2011.5977795     Document Type: Conference Paper

References (8)

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