Super-high-frequency SAW resonators on AlN/diamond

IEEE Electron Device Letters

Volumn 33, Issue 4, 2012, Pages 495-497

  Rodriguez Madrid J G ^a   Iriarote G F ^a   Pedros, J ^b   Williams, O A ^c   Brink, D ^c   Calle, F ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c FRAUNHOFER INSTITUTE FOR APPLIED SOLID STATE PHYSICS IAF   (Germany)

Author keywords

AlN diamond; super high frequency band; surface acoustic wave (SAW) resonator; thickness influence

Indexed keywords

ALN; KEY PARAMETERS; OUT OF BAND REJECTION; PIEZOELECTRIC LAYERS; SAW DEVICE; SAW RESONATORS; SUPER-HIGH-FREQUENCY BAND; SURFACE ACOUSTIC WAVE (SAW) RESONATOR; SURFACE ACOUSTIC WAVE RESONATORS; THICKNESS INFLUENCE;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTOELECTRIC EFFECTS; FREQUENCY BANDS; LITHOGRAPHY;

RESONATORS;

EID: 84859218746     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2012.2183851     Document Type: Article

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