Combination of e-beam lithography and of high velocity AlN/diamond-layered structure for SAW filters in X band

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 54, Issue 7, 2007, Pages 1486-1491

  Kirsch, Philippe ^a   Assouar, Mohamed B ^a   Elmazria, Omar ^a   El Hakiki, M ^a   Mortet, Vincent ^b   Alnot, Patrick ^a  

^a INSTITUT JEAN LAMOUR   (France)

^b HASSELT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ALUMINUM COMPOUNDS; NATURAL FREQUENCIES; TRANSDUCERS; VELOCITY MEASUREMENT;

DIAMOND LAYERED STRUCTURES; INTERDIGITAL TRANSDUCERS; PIEZOELECTRIC ALUMINUM NITRIDE THIN FILMS; SAW FILTERS;

ELECTRON BEAM LITHOGRAPHY;

EID: 34547430969     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2007.411     Document Type: Article

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