Surface acoustic wave propagation characteristics of aluminum nitride thin films grown on polycrystalline diamond

Journal of Applied Physics

Volumn 93, Issue 12, 2003, Pages 9604-9609

  Iriarte, G F ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; ALUMINUM NITRIDE; ATOMIC FORCE MICROSCOPY; DIAMONDS; METALLIZING; POLYCRYSTALLINE MATERIALS; X RAY DIFFRACTION ANALYSIS;

PHASE VELOCITIES;

THIN FILMS;

EID: 0037805692     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1574172     Document Type: Article

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