Growth of AIN piezoelectric film on diamond for high-frequency surface acoustic wave devices

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 52, Issue 10, 2005, Pages 1806-1811

  Benetti, Massimiliano ^a,b   Cannatà, Domenico ^a,c   Di Pietrantonio, Fabio ^a,d   Verona, Enrico ^a,c,e,f,g,h  

^a IEEE   (Italy)

^b CNR Consiglio Nazionale delle Ricerche   (Italy)

^c CNR   (Italy)

^d O M Corbino Institute of Acoustics of CNR

^e Institute of Chemical Problems of Ecology   (Russian Federation)

^f AMERICAN INSTITUTE OF PHYSICS   (United States)

^g ACOUSTICAL SOCIETY OF AMERICA   (United States)

^h ELECTROCHEMICAL SOCIETY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

INTERDIGITAL LAYERS; PIEZOELECTRIC LAYERS;

DIAMONDS; PIEZOELECTRICITY; PROBLEM SOLVING; SINGLE CRYSTALS;

ALUMINUM NITRIDE;

EID: 28444461508     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2005.1561635     Document Type: Article

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