Nanotechnology for SAW devices on AlN epilayers

Materials Science and Engineering: B

Volumn 93, Issue 1-3, 2002, Pages 154-158

  Palacios, T ^a   Calle, F ^a   Monroy, E ^a   Grajal, J ^a   Eickhoff, M ^b   Ambacher, O ^b   Prieto, C ^c  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^b WALTER SCHOTTKY INSTITUT   (Germany)

^c INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

AlN; e Beam lithography; Nitride technology; Surface and bulk acoustic waves

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC SURFACE WAVE DEVICES; ELECTRON BEAM LITHOGRAPHY; FOURIER TRANSFORMS; MOLECULAR BEAM EPITAXY; NANOTECHNOLOGY; SUBSTRATES;

BULK ACOUSTIC WAVES (BAW);

ALUMINUM NITRIDE;

EID: 0037198543     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(02)00022-3     Document Type: Conference Paper

References (13)