메뉴 건너뛰기




Volumn 51, Issue 3, 2004, Pages 368-371

Surface Acoustic Wave Properties of Freestanding Diamond Films

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE PROPAGATION; CHEMICAL VAPOR DEPOSITION; CRYSTAL ORIENTATION; DIAMOND FILMS; FABRICATION; LIGHT SCATTERING; PIEZOELECTRIC DEVICES; SURFACE WAVES; ULTRASONIC APPLICATIONS;

EID: 2342574297     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1320794     Document Type: Article
Times cited : (15)

References (14)
  • 1
    • 0032165843 scopus 로고    scopus 로고
    • Diamond for electronics: Future prospects of diamond SAW devices
    • J. T. Glass, B. A. Fox, D. L. Dreifus, and B. R. Stoner, "Diamond for electronics: Future prospects of diamond SAW devices," MRS Bulletin, vol. 23. no. 9, pp. 49-55, 1998.
    • (1998) MRS Bulletin , vol.23 , Issue.9 , pp. 49-55
    • Glass, J.T.1    Fox, B.A.2    Dreifus, D.L.3    Stoner, B.R.4
  • 4
    • 0031074321 scopus 로고    scopus 로고
    • Non-destructive evaluation of diamond and diamond-like carbon films by laser induced surface acoustic waves
    • D. Schneider, T. Schwarz, H.-J. Scheibe, and M. Panzner, "Non-destructive evaluation of diamond and diamond-like carbon films by laser induced surface acoustic waves," Thin Solid Films, vol. 295, pp. 107-116, 1997.
    • (1997) Thin Solid Films , vol.295 , pp. 107-116
    • Schneider, D.1    Schwarz, T.2    Scheibe, H.-J.3    Panzner, M.4
  • 5
    • 0031648283 scopus 로고    scopus 로고
    • Density and elastic constants of hot-filament-deposited polycrystalline diamond films: Methane concentration dependence
    • R. Kuschnereit, P. Hess, D. Albert, and W. Kulisch, "Density and elastic constants of hot-filament-deposited polycrystalline diamond films: Methane concentration dependence," Thin Solid Films, vol. 312, pp. 66-72, 1998.
    • (1998) Thin Solid Films , vol.312 , pp. 66-72
    • Kuschnereit, R.1    Hess, P.2    Albert, D.3    Kulisch, W.4
  • 6
    • 0035269353 scopus 로고    scopus 로고
    • Dispersion of surface acoustic waves in polycrystalline diamond plates
    • G. Lehmann, M. Schreck, L. Hou, J. Lambers, and P. Hess, "Dispersion of surface acoustic waves in polycrystalline diamond plates," Diam. Relat. Mater., vol. 10, pp. 686-692, 2001.
    • (2001) Diam. Relat. Mater. , vol.10 , pp. 686-692
    • Lehmann, G.1    Schreck, M.2    Hou, L.3    Lambers, J.4    Hess, P.5
  • 7
    • 0000992647 scopus 로고    scopus 로고
    • Characterization of acoustic Lamb wave propagation in polycrystalline diamond films by laser ultrasonics
    • M. D. Whitfield, B. Audic, C. M. Flannery, L. P. Kehoe, and R. B. Jackman, "Characterization of acoustic Lamb wave propagation in polycrystalline diamond films by laser ultrasonics," J. Appl. Phys., vol. 88, pp. 2984-2993, 2000.
    • (2000) J. Appl. Phys. , vol.88 , pp. 2984-2993
    • Whitfield, M.D.1    Audic, B.2    Flannery, C.M.3    Kehoe, L.P.4    Jackman, R.B.5
  • 8
    • 36449009547 scopus 로고
    • Brillouin light scattering on chemical-vapor-deposited polycrystalline diamond: Evaluation of the elastic moduli
    • X. Jiang, J. V. Harzer, B. Hillebrands, C. Wild, and P. Koidl, "Brillouin light scattering on chemical-vapor-deposited polycrystalline diamond: Evaluation of the elastic moduli," Appl. Phys. Lett., vol. 59, pp. 1055-1057, 1991.
    • (1991) Appl. Phys. Lett. , vol.59 , pp. 1055-1057
    • Jiang, X.1    Harzer, J.V.2    Hillebrands, B.3    Wild, C.4    Koidl, P.5
  • 9
    • 0001739343 scopus 로고    scopus 로고
    • Line-focus acoustic microscopy measurements of elastic constants for materials with high acoustic velocities
    • A. Tourlog, W. Li, and J. D. Achenbach, "Line-focus acoustic microscopy measurements of elastic constants for materials with high acoustic velocities," Appl. Phys. Lett., vol. 69. pp. 3680-368 2, 1996.
    • (1996) Appl. Phys. Lett. , vol.69 , pp. 3680-3682
    • Tourlog, A.1    Li, W.2    Achenbach, J.D.3
  • 10
    • 0009661538 scopus 로고
    • Low-pressure, metastable growth of diamond and diamondlike phases
    • J. C. Angus and C. C. Hayman, "Low-pressure, metastable growth of diamond and diamondlike phases," Science, vol. 241, pp. 913-921, 1988.
    • (1988) Science , vol.241 , pp. 913-921
    • Angus, J.C.1    Hayman, C.C.2
  • 11
    • 0028417092 scopus 로고
    • In-situ Raman investigation of diamond films during growth and etching processes
    • L. Fayette, B. Marcus, M. Mermoux, L. Abello, and G. Lucazeau, "In-situ Raman investigation of diamond films during growth and etching processes," Diam. Relat. Mater., vol. 3, pp. 438-442, 1994.
    • (1994) Diam. Relat. Mater. , vol.3 , pp. 438-442
    • Fayette, L.1    Marcus, B.2    Mermoux, M.3    Abello, L.4    Lucazeau, G.5
  • 12
    • 0026471287 scopus 로고
    • Broadband detection of laser-excited surface acoustic waves by a novel transducer employing ferroelectric polymers
    • H. Coufal, R. Grygier, P. Hess, and A. Neubrand, "Broadband detection of laser-excited surface acoustic waves by a novel transducer employing ferroelectric polymers," J. Acoust. Soc. Amer., vol. 92, pp. 2980-2983, 1992.
    • (1992) J. Acoust. Soc. Amer. , vol.92 , pp. 2980-2983
    • Coufal, H.1    Grygier, R.2    Hess, P.3    Neubrand, A.4
  • 13
    • 0033296254 scopus 로고    scopus 로고
    • Elastic properties of GaAs obtained by inversion of laser-generated surface acoustic wave measurements
    • C. M. Flannery, E. Chilla, S. Semenov, and H.-J. Fröhlich, "Elastic properties of GaAs obtained by inversion of laser-generated surface acoustic wave measurements," in Proc. IEEE Ultrason. Symp., 1999, pp. 501-504.
    • (1999) Proc. IEEE Ultrason. Symp. , pp. 501-504
    • Flannery, C.M.1    Chilla, E.2    Semenov, S.3    Fröhlich, H.-J.4
  • 14
    • 0031185518 scopus 로고    scopus 로고
    • Optical system for rapid materials characterization with the transient grating technique: Application to nondestructive evaluation of thin films used in microelectronics
    • J. A. Rogers, M. Fuchs, M. J. Banet, J. B. Hanselman, R. Logan, and K. A. Nelson, "Optical system for rapid materials characterization with the transient grating technique: Application to nondestructive evaluation of thin films used in microelectronics," Appl. Phys. Lett., vol. 71, pp. 225-227, 1997.
    • (1997) Appl. Phys. Lett. , vol.71 , pp. 225-227
    • Rogers, J.A.1    Fuchs, M.2    Banet, M.J.3    Hanselman, J.B.4    Logan, R.5    Nelson, K.A.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.