Surface-acoustic-wave transducers for the extremely-high-frequency range using AlN/SiC(0001)

Semiconductor Science and Technology

Volumn 19, Issue 2, 2004, Pages 256-259

  Takagaki, Y ^a   Hesjedal, T ^a   Brandt, O ^a   Ploog, K H ^a  

^a PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

INTERDIGITAL TRANSDUCERS; SURFACE ACOUSTIC WAVE TRANSDUCERS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC TRANSDUCERS; ACOUSTIC WAVE PROPAGATION; NATURAL FREQUENCIES; SILICON CARBIDE;

ALUMINUM NITRIDE;

EID: 1242265536     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/19/2/023     Document Type: Article

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