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Thin Solid Films

Volumn 520, Issue 13, 2012, Pages 4362-4368

Spinodal decomposition of Ti 0.33Al 0.67N thin films studied by atom probe tomography

(5) Johnson, L J S a Thuvander, M b Stiller, K b Oden M a Hultman, L a

a LINKÖPING UNIVERSITY (Sweden)

b CHALMERS UNIVERSITY OF TECHNOLOGY (Sweden)

Author keywords

Atom probe tomography; Spinodal decomposition; Thin films; Titanium aluminum nitride

Indexed keywords

ALN; AS-DEPOSITED FILMS; ATOM PROBE TOMOGRAPHY; CATHODIC ARC EVAPORATION; KIRKENDALL EFFECTS; N VACANCY; PHASE DECOMPOSITIONS; SPINODALS; TITANIUM ALUMINUM NITRIDE;

ALUMINUM; ALUMINUM NITRIDE; ELECTRON MICROSCOPY; SODIUM CHLORIDE; STOICHIOMETRY; THIN FILMS; TITANIUM; TITANIUM NITRIDE; X RAY DIFFRACTION;

SPINODAL DECOMPOSITION;

EID: 84859159462 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2012.02.085 Document Type: Article

Times cited : (67)

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