Age hardening in arc-evaporated ZrAlN thin films

Scripta Materialia

Volumn 62, Issue 10, 2010, Pages 739-741

  Rogstrom L ^a   Johnson, L J S ^a   Johansson, M P ^b   Ahlgren, M ^c   Hultman, L ^a   Oden M ^a  

^a LINKÖPING UNIVERSITY   (Sweden)

^b SECO TOOLS AB   (Sweden)

^c Sandvik Tooling Sverige AB   (Sweden)

Author keywords

Hardness; Nanoindentation; PVD; TEM; Thin films

Indexed keywords

ALN; ARC EVAPORATION; AS-DEPOSITED FILMS; CO-SUBSTRATE; EXCESS NITROGEN; HARDENING EFFECTS; NANOSCALE DOMAIN; PVD; TEM; WURTZITE PHASE;

CAVITY RESONATORS; COBALT; HARDNESS; SODIUM CHLORIDE; THIN FILMS; ZINC SULFIDE; ZIRCONIUM;

AGE HARDENING;

EID: 77649272008     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2010.01.049     Document Type: Article

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